MRI: Development of Instrumentation for Plasma-Assisted Liquid Phase Epitaxy of III-Nitrides

重大研究仪器项目的这一奖项支持凯斯西大学开发一种新型的等离子体辅助液相外延(PLPE)系统，用于生长氮化镓及相关材料。已建立的液相外延(LPE)方法将与最近开发的等离子体辅助熔体生长方法相结合，提供一种生长直径达5厘米的设备级单晶层的系统。为了实现这一目标，将设计和建造一种高度通用的PLPE生长系统，具有近大气压力等离子体源，温度和温度梯度控制，并提供直线和旋转运动。等离子体辅助液相外延(PLPE)的一些优点是：(1)它们比系统生长系统的构建和运行成本低得多；(2)更高的生长速度和更高质量的材料；(3)简单且环境清洁；(4)应用于其他类别半导体材料的潜力；(4)各种新材料研究的新可能性。此外，紫外线和蓝色激光、高温和高功率电子等重要技术也有潜在的应用前景。通过为开创性的材料生长研究提供一种新技术，新仪器将对国家的学术研究基础设施产生更广泛的影响。经验表明，LPE过程是一种快速、经济高效的技术，用于研究创新材料的研究概念，因此特别适合大学的研究环境。该奖项来自重大研究仪器计划，支持凯斯西部大学开发一种新型的等离子体辅助液相外延(PLPE)系统，用于生长氮化镓及相关材料。PLPE生长系统将使用接近大气压力的等离子体源运行，温度和温度梯度控制，并将设计和建造直线和旋转运动的设施。新仪器的一些优点是：(1)经济；(2)更高的生长速度和更高质量的材料；(3)简单和环境清洁；(4)适用于其他类别的半导体材料。该系统将为各种新材料的研究开辟新的可能性。此外，紫外线和蓝色激光、高温和高功率电子等重要技术也有潜在的应用前景。通过为开创性的材料生长研究提供一种新技术，新仪器将对国家的学术研究基础设施产生更广泛的影响。它特别适合大学的研究环境。

This award from the Major Research Instrumentation Program supports Case Western University to develop a novel, plasma-assisted liquid phase epitaxy (PLPE) system for the growth of gallium nitride and related materials. The established methods of liquid phase epitaxy (LPE) will be combined with recently developed plasma assisted melt growth methods to provide a system for growing device-quality single crystal layers up to 5 cm in diameter. To accomplish this end, a highly versatile PLPE growth system with a near-atmospheric pressure plasma source, temperature and temperature gradient control, and provision for linear and rotational motion will be designed and built. Some of the advantages of Plasma Assisted Liquid Phase Epitaxy (PLPE) are: (1) they are much less expensive to build and to run than growth systems for systems; (2) higher growth rates and higher quality material; (3) simplicity and in environmental clean; (4) potential for application to other classes of semiconductor materials new possibilities for a wide variety of novel materials research. In addition, there are potential applications for important technologies such as ultraviolet and blue lasers, and high-temperature and high power electronics. The new instrumentation will have broader impact on the nation's academic research infrastructure by providing a new technology for pioneering materials growth research. Experience has shown that the LPE process is a rapid, cost-effective technique for investigation of innovative materials research concepts, and therefore is especially well suited to the university research environment.This award from the Major Research Instrumentation Program supports Case Western University with the development a novel, plasma-assisted liquid phase epitaxy (PLPE) system for the growth of gallium nitride and related materials. The PLPE growth system will operate with a near-atmospheric pressure plasma source, temperature and temperature gradient control, and provision for linear and rotational motion will be designed and built. Some of the advantages of the new instrument are: (1) economic; (2) higher growth rates and higher quality material; (3) simplicity and in environmental clean; (4) application to other classes of semiconductor materials. The system will open new possibilities for a wide variety of novel materials research. In addition, there are potential applications for important technologies such as ultraviolet and blue lasers, and high-temperature and high power electronics. The new instrumentation will have broader impact on the nation's academic research infrastructure by providing a new technology for pioneering materials growth research. It is especially well suited to the university research environment.