A new low temperature generic 'green' chemistry for deposition of nanocrystalline films (TSE99-F)

用于沉积纳米晶薄膜的新型低温通用“绿色”化学物质 (TSE99-F)

• 批准号: 0424982
• 负责人: Michael Zachariah
• 金额: $ 20.8万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-01-07 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0424982&HistoricalAwards=false
• 关键词: new; low; temperature; generic; green

This is an exploration of a new chemical vapor deposition (CVD) process for nanocrystalline metals and ceramic coatings based on the vapor-phase reaction between elemental sodium and metal chlorides or other halogenated species. The relationship between vapor-phase chemistry and the resulting thin films are studied using ex-situ analysis of film properties and use of a CVD model, developed as part of this effort, incorporating chemical kinetics, vapor flow, transport, and nucleation. The effects, and possible control, of salt supersaturations on film morphology are studied. The relationship between gas-phase chemistry and film microstructure for processes involving simultaneous deposition of a metal and ceramic to form a nanocrystalline/amorphous structure is also studied; these products may have properties necessary for a superhard coating.The new approach studied in this project offers the prospect of new industrial coatings with superior properties and/or a new route to known coatings that is more sound environmentally than current technology.

这是一种新的化学气相沉积（CVD）工艺的纳米晶金属和陶瓷涂层的基础上元素钠和金属氯化物或其他卤化物种之间的气相反应的探索。 汽相化学和所得到的薄膜之间的关系进行了研究，使用非原位分析膜的性能和使用的CVD模型，开发作为这项工作的一部分，将化学动力学，蒸汽流动，运输，和成核。 研究了盐过饱和度对薄膜形貌的影响和可能的控制。 还研究了涉及同时沉积金属和陶瓷以形成纳米晶/非晶结构的工艺的气相化学和膜微结构之间的关系;这些产品可能具有超硬涂层所需的性能。本项目研究的新方法提供了具有上级性能和/或一种比现有技术更环保的已知涂层的新途径。