SST: CAD Tools and Verification for Resonator-Based Sensor Technology

SST：基于谐振器的传感器技术的 CAD 工具和验证

• 批准号: 0426660
• 负责人: Sanjay Govindjee
• 金额: $ 37.5万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0426660&HistoricalAwards=false
• 关键词: SST; CAD; Tools; Verification; Resonator

SST: CAD Tools and Verification for Resonator-Based Sensor TechnologyA major effort in sensing technology centers about the miniaturization of sensing elements.Much investment is being expended upon the development of sensing systems that can be incorpo-ratedinto autonomous micro-electrical-mechanical systems (MEMS) for widespread wireless sensingneeds ranging from monitoring buildings and bridges for safety, to electronic noses for detectingatmospheric chemical hazards across wide geographic areas, to electronic ears for monitoring com-municationchannels just to name a few. One key to the successful deployment of such systemsis overcoming the energy needs of sensor nodes. Note that sensors need power not only to sensebut also to communicate. An attractive technology for dealing with many of these issues is bulk-acousticwave resonators (BAWRs); at the MEMS scale of a few microns these devices operate inthe GHz range (cell phone frequencies). BAWRs can be used as high quality frequency referencesin chemical sensors, elements of signal processing filter networks, and as elements of wireless com-municationsystems all at very low power compared to alternate technologies. Much of the promiseof such devices has been seen in proof-of-concept experiments that have recently been published.However, a careful reading of these publications shows that while the general operating principlesof BAWRs are known, there is a distinct lack of accuracy to which resonant-based MEMS sensordesigners understand expected system behavior. This proposal intends to help rectify this defi-ciencyand to promote more rapid development of successful BAWR devices by developing freelyavailable computer aided design (CAD) tools.This interdisciplinary team of researchers intends to not only develop a CAD tool but to alsoconduct experiments to verify its accuracy. Their CAD software is designed to accurately predictresonator quality degradation from thermoelastic damping, intrinsic material losses, and anchor(or clamping) losses. They will tackle the problem in a new way for the MEMS community bylooking directly to the governing partial differential equations (PDEs) for the resonator behaviorand then abstracting small, accurate, and fast models for design level computations using advancedKrylov model reduction methods. Novel aspects in their approach include a modeling system thatwill automatically separate different damping effects from each other and make possible new virtualexperiments for the creation of heretofore unknown BAWRs. Key to this last point is their proposalto develop an optimization module for the CAD tool that will allow for the optimization of targetedperformance parameters, such as transfer functions, that are needed for higher level sensor nodedesign. Integral to the proposed work will be the fabrication of poly- and single-crystal BAWRsthat will test the models, help refine them, and test new concepts in coupled resonator designs.The team make-up includes experts in material modeling, scientific computing, and MEMS designand fabrication. They intend to build upon their past successes in creating new MEMS devicesand in creating and disseminating MEMS design software.The scientific questions to be addressed in this proposal are of a critical importance to thecommunity. But beyond these merits, it is noted that the proposal will have the broader impactof developing the community's research infrastructure as the software to be developed will be dis-tributedfreely. On the human resource side the proposers will fill a broader objective by trainingstudents in an highly interdisciplinary field by combining training in semi-conductor engineeringwith mechanical modeling and scientific computing. Such graduates are sorely needed in the com-munity.The proposers additionally plan to recruit from the successful Summer UndergraduateProgram in Engineering Research at Berkeley (SUPERB). This program aims to reach out tounder-represented groups in engineering and provide them with a high quality research experienceand encourage them to aspire to graduate degrees. The PIs have successfully participated in thisprogram in the past.

SST：基于谐振器的传感器技术的CAD工具和验证传感技术的主要努力集中在传感元件的小型化上。大量投资正在花费在传感系统的开发上，这些传感系统可以并入自主微机电系统（MEMS）中，以满足广泛的无线传感需求，从监测建筑物和桥梁的安全性，电子鼻用于检测大范围地理区域的大气化学危害，电子耳用于监控通信信道，仅举几例。成功部署这种系统的一个关键是克服传感器节点的能量需求。请注意，传感器不仅需要电力来感知，还需要电力来通信。一个有吸引力的技术来处理许多这些问题是体声波谐振器（BAWRs），在几微米的MEMS规模，这些设备在GHz范围（手机频率）的工作。BAWR可用作化学传感器中的高质量频率基准、信号处理滤波器网络的元件以及无线通信系统的元件，与替代技术相比，所有这些都具有非常低的功耗。在最近发表的概念验证实验中，已经看到了这种器件的大部分前景。然而，仔细阅读这些出版物表明，虽然BAWR的一般工作原理是已知的，但基于谐振的MEMS传感器设计者对预期系统行为的理解明显缺乏准确性。该建议旨在通过开发免费的计算机辅助设计（CAD）工具来帮助纠正这一缺陷，并促进更快地开发成功的BAWR器件。这个跨学科的研究团队不仅打算开发CAD工具，而且还打算进行实验以验证其准确性。他们的CAD软件设计用于准确预测谐振器质量退化，包括热弹性阻尼、固有材料损耗和锚（或夹紧）损耗。他们将以一种新的方式为MEMS社区解决这个问题，直接寻找谐振器行为的偏微分方程（PDE），然后使用先进的Krylov模型简化方法为设计级计算提取小，准确和快速的模型。他们的方法中的新方面包括一个建模系统，该系统将自动将不同的阻尼效应相互分离，并使创建迄今未知的BAWR的新虚拟实验成为可能。这最后一点的关键是他们的建议，开发一个优化模块的CAD工具，将允许优化的目标性能参数，如传递函数，这是需要更高层次的传感器节点设计。整体的工作将是多晶和单晶BAWR的制造，这将测试模型，帮助完善它们，并测试耦合谐振器设计中的新概念。团队组成包括材料建模，科学计算和MEMS设计和制造方面的专家。他们打算建立在他们过去的成功，在创造新的MEMS devices和创造和传播MEMS设计软件。在这个建议中要解决的科学问题是至关重要的。但除了这些优点之外，值得注意的是，该提案将对开发社区的研究基础设施产生更广泛的影响，因为要开发的软件将免费分发。在人力资源方面，提议者将通过将半导体工程培训与机械建模和科学计算相结合，在高度跨学科的领域培训学生来实现更广泛的目标.这些毕业生是社区急需的。提议者还计划从伯克利成功的工程研究暑期本科生项目（SUPERB）中招聘。该计划旨在接触到工程领域的有代表性的群体，为他们提供高质量的研究经验，并鼓励他们攻读研究生学位。PI过去曾成功地参与过该计划。