Device Physics of Nanoscale Electronic Devices beyond the Technology Roadmap

这项研究的目的是研究基础物理，这是成功地为传统FET引入新材料和评估拟议的基于隧道的新型器件所必需的。这种方法是收集带到带隧道的实验数据，这些带对带的掺杂分布非常陡峭，适用于未来的纳米器件。我们将研究应变硅、锗和半导体纳米线中的带间隧道效应。带间隧道效应的数值模型将与实验数据进行校准/验证，并随后用于研究器件设计空间和研究纳米尺度FET的最终尺度极限，包括关态泄漏的影响。具有锐利亚阈值关断特性的新型隧穿器件将被研究。这些设备显然超出了半导体行业目前的技术路线图。目标是找到解决方案，以减少有源设备的关断电流。该计划的更广泛影响方面将促进纳米电子劳动力的多样性，并提供智力技术转让、研究和教育的整合、公共教育和促进伙伴关系。教育和外展项目的目标是纳米电子领域的机会--这是保持美国在全球经济中领导地位的一个重要领域。这项提议的一个组成部分是关于纳米科学和纳米技术的公共教育。通过让科学记者参与研究计划，将通过改善各种媒体的科学报道来提高公众对科学技术的理解。作为回报，科学记者将参与教育未来的科学家(学生)，使他们能够有效地向公众传播科学概念。

The objective of this research is to study the fundamental physics that is essential to both the success of introducing new materials for conventional FETs and the assessment of proposed novel tunneling-based devices. The approach is to gather experimental data of band-to-band tunneling with extremely steep doping profiles appropriate to future nanoscale devices. Band-to-band tunneling in strained silicon, germanium, and semiconductor nanowires will be studied. Numerical models for band-to-band tunneling will be calibrated/verified with the experimental data and subsequently employed to study the device design space and examine the ultimate scaling limits for nanoscale FETs including the effects of off-state leakage. Novel tunneling-based devices with sharp subthreshold turn-off characteristics will be studied. These devices are clearly beyond the present technology roadmap of the semiconductor industry. The goal is to find solutions to reduce the off-state current of active devices. The broader impacts aspects of this program will advance diversity in the nanoelectronics workforce and provide intellectual technology transfer, integration of research and education, public education, and promotion of partnerships. The educational and outreach programs target opportunities in nanoelectronics - an important area to maintain US leadership in a global economy. An integral component of this proposal is public education on nanoscience and nanotechnology. By engaging science journalists in the research program, public understanding of science and technology will be enhanced through improved science reporting in various media. In return, the science journalists will join in educating the future scientist (the students) on effective communication of science concepts to the general public.