SBIR Phase I: A Quality Monitor for Enabling Water Recycling in Semiconductor Processing - The Particle Scout

SBIR 第一阶段：用于实现半导体加工中水回收的质量监控器 - The Particle Scout

• 批准号: 0512803
• 负责人: Sameer Madanshetty
• 金额: --
• 依托单位: Uncopiers, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-07-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0512803&HistoricalAwards=false
• 关键词: SBIR; Phase; Quality; Monitor; Enabling

This Small Business Innovation Research (SBIR) Phase I project concerns Ultrapure Water (UPW), the lifeblood of the semiconductor industry. The proposed instrument seeks to satisfy the International Technology Roadmap for Semiconductors (ITRS) requirements on two counts: 1. full flow inspections, 2. detection of sub-100nm liquid-borne particles. A typical semiconductor fab uses about 3 million gallons of UPW every day. To control operating costs and ensure sustainable growth, ITRS specifies that 70% of the UPW used in 2005 be recycled or reused (90% by 2010). As a UPW quality monitor fast enough to truly be an in-line, real-time particle detector of an entire DI water stream at the ultimate (50 nm and below) level of particulate purity, the Acoustic Coaxing Induced Microcavitation (ACIM) Particle Scout will enable these ITRS objectives for recycling UPW. The proposed ACIM Particle Scout is designed to meet important financial (operating costs) and quality (sub-100nm precision) needs of the Semiconductor industry. Beyond the IC manufacturing industry the Particle Scout will find applications in all UPW-intensive enterprises: nuclear reactors and other power generators, the pharmaceutical industry, biotechnology, space exploration, and processing of advanced high purity chemicals. This concept will enable and enhance environmental initiatives for the recycling of UPW.

这个小型企业创新研究（SBIR）第一阶段项目涉及超纯水（UPW），半导体行业的生命线。拟议的文书旨在满足国际半导体技术路线图（ITRS）在两个方面的要求：1。全流程检查，2。检测100 nm以下的液体颗粒。一个典型的半导体工厂每天使用大约300万加仑的UPW。为了控制运营成本并确保可持续增长，ITRS规定，2005年使用的UPW中有70%将被回收或再利用（到2010年将达到90%）。作为一个UPW质量监测器足够快，真正成为一个在线，实时粒子检测器的整个去离子水流在最终（50 nm及以下）水平的颗粒纯度，声诱导微空化（ACIM）粒子探测器将使这些ITRS目标回收UPW。拟议的ACIM粒子探测器旨在满足半导体行业重要的财务（运营成本）和质量（亚100纳米精度）需求。除了IC制造业，Particle Scout还将在所有UPW密集型企业中找到应用：核反应堆和其他发电机，制药业，生物技术，太空探索和先进的高纯度化学品加工。这一概念将促进和加强对UPW的回收利用的环保举措。