SBIR Phase II: ACIM deBonder: Thin Film Integrity Testing Using Controlled Microcavitation

SBIR 第二阶段：ACIM deBonder：使用受控微空化进行薄膜完整性测试

• 批准号: 0422191
• 负责人: Sameer Madanshetty
• 金额: --
• 依托单位: Uncopiers, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-01 至 2006-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0422191&HistoricalAwards=false
• 关键词: SBIR; Phase; II; ACIM; deBonder

This Small Business Innovation Research (SBIR) Phase II project will develop a new method of determining how strong a thin film anchors to a substrate. The ACIM deBonder(trade mark)uses controlled microcavitation to directly reveal a thin film's adhesion strength by subjecting it to controlled erosion. ACIM is a means of constructively controlling acoustic microcavitation. Substrates are not harmed. The ACIM deBonder(trade mark) will be applicable to any type of film or coating that can be eroded in a controlled manner by cavitation. It is essentially a nondestructive method that only uses small areas of films. No special sample preparation is needed and the method is capable of in situ inspection. The ACIM deBonder tool will be developed for use in microelectronic manufacture. Semiconductor chips rely on the various film layers of their constitution to bond reliably. Beyond semiconductors the deBonder could be useful in optical coatings, and all contexts involving surface modification involving films.The broaderimpacts of this project will be a new method of determining the adhesion strength of thin films; it is expected to advance the science of thin film engineering. The controlled erosion of ACIM can itself be used to create nascent surfaces in preparation for thin film deposition. Ultimately, the principle of ACIM deBonder (trade mark) relies controlled caviational erosion, in fact it relies on controlling the very fundamental process of phase change, the control of nucleation--the ability to convert a liquid into a gas in the vicinity of a solid phase. This should have much wider applications in a variety of chemical processing, e.g. in the control of the boiling processes in chemical and nuclear reactors. The study of this acoustically mediated nucleation control could form an active field/area of research and education.

这个小型企业创新研究(SBIR)第二阶段项目将开发一种新的方法来确定薄膜与衬底的结合强度。ACIM脱粘机(商标)使用受控微空化，通过使薄膜受到受控侵蚀来直接显示薄膜的粘合强度。ACIM是一种建设性地控制声学微空化的手段。基材不会受到损害。ACIM脱粘机(商标)将适用于可通过气蚀以受控方式腐蚀的任何类型的薄膜或涂层。它本质上是一种非破坏性的方法，只使用小面积的薄膜。该方法不需要特殊的样品制备，可进行现场检测。ACIM脱粘机工具将被开发用于微电子制造。半导体芯片依靠其构成的各种膜层可靠地结合在一起。除半导体外，脱粘剂还可用于光学涂层和所有涉及薄膜表面改性的场合。该项目的广泛影响将是一种确定薄膜结合强度的新方法；它有望推动薄膜工程科学的发展。ACIM的受控侵蚀本身可以用来创建新生的表面，为薄膜沉积做准备。归根结底，ACIM脱粘机(商标)的原理依赖于可控的空穴侵蚀，事实上它依赖于控制相变的最基本过程，即控制成核--在固相附近将液体转化为气体的能力。这应该在各种化学加工中有更广泛的应用，例如在控制化学反应和核反应堆的沸腾过程中。这种声学成核控制的研究可以形成一个活跃的研究和教育领域。