SBIR Phase II: ACIM deBonder: Thin Film Integrity Testing Using Controlled Microcavitation

SBIR 第二阶段：ACIM deBonder：使用受控微空化进行薄膜完整性测试

• 批准号: 0422191
• 负责人: Sameer Madanshetty
• 金额: --
• 依托单位: Uncopiers, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-01 至 2006-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0422191&HistoricalAwards=false
• 关键词: SBIR; Phase; II; ACIM; deBonder

This Small Business Innovation Research (SBIR) Phase II project will develop a new method of determining how strong a thin film anchors to a substrate. The ACIM deBonder(trade mark)uses controlled microcavitation to directly reveal a thin film's adhesion strength by subjecting it to controlled erosion. ACIM is a means of constructively controlling acoustic microcavitation. Substrates are not harmed. The ACIM deBonder(trade mark) will be applicable to any type of film or coating that can be eroded in a controlled manner by cavitation. It is essentially a nondestructive method that only uses small areas of films. No special sample preparation is needed and the method is capable of in situ inspection. The ACIM deBonder tool will be developed for use in microelectronic manufacture. Semiconductor chips rely on the various film layers of their constitution to bond reliably. Beyond semiconductors the deBonder could be useful in optical coatings, and all contexts involving surface modification involving films.The broaderimpacts of this project will be a new method of determining the adhesion strength of thin films; it is expected to advance the science of thin film engineering. The controlled erosion of ACIM can itself be used to create nascent surfaces in preparation for thin film deposition. Ultimately, the principle of ACIM deBonder (trade mark) relies controlled caviational erosion, in fact it relies on controlling the very fundamental process of phase change, the control of nucleation--the ability to convert a liquid into a gas in the vicinity of a solid phase. This should have much wider applications in a variety of chemical processing, e.g. in the control of the boiling processes in chemical and nuclear reactors. The study of this acoustically mediated nucleation control could form an active field/area of research and education.

这项小型企业创新研究（SBIR）II期项目将开发一种新方法，以确定薄膜如何固定在底物上。 ACIM DEBONDER（商标）使用受控的微浪费来直接揭示薄膜的粘附强度，以受控侵蚀。 ACIM是一种建设性控制声学微浪费的一种手段。底物没有受到伤害。 ACIM DEBONDER（商标）将适用于可以通过空化以控制方式侵蚀的任何类型的膜或涂层。从本质上讲，这是一种仅使用薄膜的无损方法。无需特殊的样品准备，该方法能够进行原位检查。 ACIM DEBONDER工具将用于微电子制造。半导体芯片依靠其宪法的各个薄膜层来可靠。除了半导体之外，调试器在光学涂层中可能很有用，并且所有涉及涉及膜的表面修饰的上下文。该项目的宽大影响将是确定薄膜的粘附强度的一种新方法。预计将推进薄膜工程的科学。 ACIM的受控侵蚀本身可用于创建新生的表面，以准备薄膜沉积。最终，ACIM DEBONDER（商标）的原理依赖于受控的Caviational侵蚀，实际上，它依赖于控制相变的非常基本的过程，即成核的控制 - 将液体转化为固体相邻气体的能力。这应该在各种化学处理中具有更大的应用，例如在控制化学和核反应堆中的沸腾过程中。对这种声学介导的成核控制控制的研究可能形成研究和教育的积极领域/领域。