SBIR Phase I: ACIM Wafer Saver: A Novel CMP Slurry Monitor

这个小型企业创新研究第一阶段项目的目标是避免半导体晶圆在化学机械平整或抛光(CMP)浆料中被未经检查的大型错误团聚物深深划伤。在集成电路制造的所有阶段，化学机械抛光已成为恢复晶片表面真实性的首选方法。目前还没有一种方法可以在使用时实现化学机械抛光安全的浆料。声学诱导微空化(ACIM)是一种建设性地控制声学微空化并引导其在特定粒子位置发生高强度能量内爆的新技术。ACIM将实现杂散大颗粒的检测和销毁，并使整个浆料化学机械抛光在使用时是安全的。高端晶圆在制造商的最后阶段被刮伤，会造成巨大的直接损失。因此，使用ACIM节省化学机械抛光后的晶圆是一种直接的节省。浆料监测-粉碎机ACIM Wafer Saver将是第一个完全在线的、实时的使用点设备，用于检测散落的大颗粒和团聚体，并将它们降低到纳米级的精细状态。快速发展的化学机械抛光行业为这种环境友好的ACIM工具提供了一个发达的市场。

This Small Business Innovation Research Phase I project is targeted to save semiconductor wafers from being deeply scratched by unchecked large errant agglomerates in chemical mechanical planarizing or polishing (CMP) slurries. CMP has become the method of choice for restoring the surface trueness of wafers at all stages of integrated circuit manufacture. No method currently exists that can implement a CMP-safe slurry at the point of use. The proposed novel technology of Acoustic Coaxing Induced Microcavitation (ACIM) is a means to constructively control acoustic microcavitation and direct its high intensity energy implosions at specific particle sites. ACIM will achieve both the detection and destruction of the stray large particles andrender the entire slurry CMP-safe at the point of use. A high-end wafer scratched at the final stages of manufacturer results in a large direct loss. Using ACIM to save post-CMP wafers is therefore a direct savings. The ACIM Wafer Saver, the slurry monitor-comminuter, would be the first fully in-line, real-time, point of use device for detecting stray large particles and agglomerates, and for reducing them to a nano-fine state. The rapidly growing CMP industry presents a well-developed market for this environmentally friendly ACIM tool.