GOALI/IUCRP: Applying Acoustic Microcavitation to Semiconductor Processing

GOALI/IUCRP：将声学微空化应用于半导体加工

• 批准号: 9500462
• 负责人: Sameer Madanshetty
• 金额: --
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-07-01 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9500462&HistoricalAwards=false
• 关键词: GOALI; IUCRP; Applying; Acoustic; Microcavitation

9500462 Madanshetty This research aims at advancing the technology of cleaning semiconductor chips and devices by ultrasonics. The current research builds on prior research on "Ultrasonically Induced Fluid-Particle Interactions at Nanometer Length Scales", which led to the discovery of "acoustic coaxing", whereby microcavitation can be induced on liquid borne microparticles by superposition of a strong acoustic field with a weak field at a very high frequency. By lowering the threshold needed for microcavitation via acoustic coaxing and combining with micro-streaming, a process to clean semiconductor is proposed. By advancing the fundamental understanding of acoustic coaxing induced microcavitation, it is expected that key process control parameters will be identified to realize a practical manufacturing process. An additional benefit of the research is expected in developing a new way of detecting liquid borne particles for ultra clean liquids. As the semiconductor industry drives towards packing of more and more information on a chip using finer and finer details, the barrier to manufacturing technology becomes the state of cleanliness. Successful completion of this project can lead to building of ultrasonic equipment with a knowledge based process control that has the potential of achieving ultra clean manufacturing environment for semiconductor. In fact, two small companies are partnering with this researcher based on this promising technology to develop instrumentation for detecting liquid borne microparticles.

9500462 Madanshetty这项研究旨在通过超声波进行清洁半导体芯片和设备的技术。当前的研究基于对“超声诱导的纳米长度尺度上的超声诱导的流体粒子相互作用”的研究，这导致了“声学哄骗”的发现，从而通过非常较高的频率较弱的强场上的强度磁场来诱导微浪费，从而在液体传播的微粒上诱导微浪费。通过降低通过声学哄骗进行微浪费所需的阈值，并与微流相结合，提出了清洁半导体的过程。通过促进对声学哄骗诱导的微浪费的基本理解，预计将确定关键过程控制参数以实现实用的制造过程。预计该研究的另一个好处是开发一种用于检测超干净液体的液体传播颗粒的新方法。随着半导体行业使用越来越细节的细节驱动越来越多的芯片信息，制造技术的障碍成为清洁度的状态。该项目的成功完成可能会导致建立具有基于知识的过程控制的超声设备，该设备有可能实现半导体的超干净制造环境。实际上，两家小公司正在与这位有前途的技术与这位研究人员合作，以开发用于检测液体传播微粒的仪器。