SBIR Phase I: ACIM deBonder: Thin Film Integrity Testing Using Controlled Microcavitation

SBIR 第一阶段：ACIM deBonder：使用受控微空化进行薄膜完整性测试

• 批准号: 0232907
• 负责人: Sameer Madanshetty
• 金额: $ 10万
• 依托单位: Uncopiers, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-01-01 至 2003-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0232907&HistoricalAwards=false
• 关键词: SBIR; Phase; ACIM; deBonder; Thin

This Small Business Innovation Research (SBIR) Phase I project will develop a new method of measuring how strongly a thin film anchors to its substrate. To date no method exists that can truly measure thin film adhesion. The Acoustic Coaxing Induced Microcaviation (ACIM) deBonder uses controlled microcavitation to directly reveal a thin film's adhesion strength by subjecting it to controlled erosion. ACIM is a means of constructively controlling acoustic microcavitation. By directing ACIM's high intensity energy implosions at specific film sites one can quantitatively determine adhesion strength. The potential commercial benefits will be applicable to any type of film or coating that can erode in a controlled manner by cavitation. This technique is a nondestructive method that only uses small areas of films. No special sample preparation is needed and the method is capable of in situ inspection. Microelectronic manufacturing and the semiconductor industries will benefit from this technology.

这个小型企业创新研究(SBIR)第一阶段项目将开发一种新的方法来测量薄膜与其衬底的锚固强度。到目前为止，还没有一种方法可以真正测量薄膜的附着力。声学诱导微空化(ACIM)脱粘机使用受控微空化，通过使薄膜受到受控侵蚀来直接显示薄膜的结合强度。ACIM是一种建设性地控制声学微空化的手段。通过在特定的薄膜位置引导ACIM的高强度能量内爆，可以定量地确定粘合强度。潜在的商业利益将适用于任何类型的薄膜或涂层，可以通过气蚀以受控的方式腐蚀。这种技术是一种非破坏性的方法，只使用小面积的胶片。该方法不需要特殊的样品制备，可进行现场检测。微电子制造和半导体行业将从这项技术中受益。