Investigation of the Deformation, Fatigue and Fracture Properties of Amorphous Diamond-like Carbon Films

四面体非晶类金刚石（ta-C）薄膜的变形、疲劳和断裂特性的研究Ioannis Chasiotis美国宾夕法尼亚大学摘要四面体非晶类金刚石（ta-C）薄膜具有极高的强度、模量、耐久性、对化学试剂的惰性和低摩擦等特点。这些特殊性质可以使得能够制造耐用且可靠的MEMS和NEMS器件。该奖项将有助于建立微加工，材料纳米结构和独立薄膜（ta-C）的机械性能之间的联系。本研究的重点是对独立的ta-C膜的机械性能的制造参数，后加工处理，和sp3/sp2碳键合比的影响。这项研究将与桑迪亚国家实验室密切合作，他们正在开发一种独特的工艺来制造坚固的ta-C MEMS。测量将通过静电驱动的微型器件以及外部驱动的测试结构进行，目前正在PI的实验室开发。局部变形/应变将主要通过基于原子力显微镜的方法进行测量。这项研究有望支持我们对ta-C薄膜中亚微米疲劳和断裂现象的理解，为开发基于成分的材料力学行为预测模型提供定量证据，并有助于优化Sandia目前的微制造工艺，以实现强大的at-C MEMS和NEMS器件。该研究计划的多维特征将为研究生和本科生提供跨学科教育和培训，他们将在MEMS，纳米机械材料表征和扫描探针显微镜领域进行学位论文，并参加PI提供的特殊跨学科课程。

Investigation of the Deformation, Fatigue, and Fracture Properties of Tetrahedral Amorphous Diamond-Like Carbon (ta-C) FilmsIoannis ChasiotisUniversity of VirginiaABSTRACTTetrahedral amorphous diamond-like carbon (ta-C) films are characterized by extreme strength, modulus, durability, inertness to chemical agents, and low friction. These special properties may enable the fabrication of durable and reliable MEMS and NEMS devices. This award will help to establish the connection between microfabrication, material nanostructure, and mechanical properties of freestanding thin (ta-C) films. The focus of this research is on the effects of fabrication parameters, post fabrication treatment, and sp3/sp2 carbon bonding ratio on the mechanical properties of freestanding ta-C films. The research will be conducted in close collaboration with Sandia National Laboratories who are developing a unique process for the fabrication of robust ta-C MEMS. Measurements will be conducted via electrostatically actuated microdevices as well as externally actuated test structures, currently under development at the PI's laboratory. The local deformations/strains will be predominately measured via Atomic Force Microscopy based methodologies. The investigation is expected to support our understanding of the sub-micron fatigue and fracture phenomena in ta-C films, provide quantitative evidence for the development of composition-based predictive models for material mechanical behavior, and contribute to the optimization of Sandia's current microfabrication process for robust at-C MEMS and NEMS devices. The multidimensional character of this research program will provide interdisciplinary education and training to graduate as well as undergraduate students who will conduct their degree theses in the fields of MEMS, nanomechanical materials characterization, and scanning probe microscopy, and attend the special interdisciplinary courses offered by the PI at the University of Virginia.