MRI: Aquisition of Nano-Imprint Lithography System

MRI：获得纳米压印光刻系统

• 批准号: 0521074
• 负责人: Alfred Crosby
• 金额: $ 70.28万
• 依托单位: University of Massachusetts Amherst
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-09-01 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0521074&HistoricalAwards=false
• 关键词: MRI; Aquisition; Nano; Imprint; Lithography

The establishment of a Nano-Imprint Lithography (NIL) Laboratory on the campus of the University of Massachusetts Amherst will permit the definition of material patterns from the multi-micron to sub-50nm length scales in an economical and efficient manner. The rapid replication and prototyping provided by this technique will enable the study of devices and structures that would otherwise be difficult or prohibitively expensive to make. NIL involves 1) the physical templating of topographic or chemical structures and 2) subsequent photo- or thermal-initiated materials synthesis. The full implementation of this laboratory requires the purchase of two instruments for which we are requesting funding: a Step-and-Flash NIL instrument from Molecular Imprints, Inc. and a state-of-the-art plasma etching system from Trion, Inc. This laboratory is critical to the success of multiple research activities involving the co-PIs and other members of the NSF MRSEC at UMass including the development of advanced materials for nanostructured devices (e.g. nanoscale patterned surfaces for sensors, single-step processing of ultra-low dielectric constant patterns, and high power density pulsed power capacitors for electric vehicles) and fundamental research into the challenges that are limiting the implementation of NIL on the manufacturing scale. The instruments will be housed in the open access Keck Nanostructures Laboratory and a comprehensive management plan is in place to ensure maintenance and accessibility to a broad user base. Additionally, the NIL Laboratory will be incorporated into existing courses on nanotechnology, and its open-access management plan will encourage use by participants in our REU and RET programs as well as faculty and students in the local five college community that includes two women's colleges: Mt. Holyoke College and Smith College. UMass Amherst is an established leader in nanoscale materials science, and this facility will further secure our leadership in device-level implementation of our discoveries while preparing students with expertise in real-world nano-scale manufacturing.This award at the University of Massachusetts Amherst will allow researchers on campus, as well as researchers in the local community and beyond, to advance and expand their expertise in materials research at sizes smaller than one-billionth of a meter. This grant will fund the purchase of two advanced technology instruments that together will enable the preparation of materials with user-defined patterns that are 1000 times smaller than the diameter of a human hair. This capability will aid in the development of new technologies such as chemical sensors, faster and more stable computer chips, and power management devices for electric vehicles. This facility will be an open-access center for faculty and students at UMass and in the local college community which includes two women's colleges: Mt. Holyoke College and Smith College. A comprehensive management plan will ensure accessibility, maintenance, and the incorporation of these instruments into materials research courses, while encouraging non-traditional researchers involved in the Research Experience for Undergraduates and Research Experience for Teachers outreach programs to use the laboratory. UMass currently has a number of exciting initiatives in nanotechnology, and the establishment of this Laboratory will ensure that we remain at the forefront of cutting edge research.

在马萨诸塞州阿默斯特大学校园内建立的纳米压印光刻（NIL）实验室将允许以经济有效的方式定义从多微米到亚50纳米长度尺度的材料图案。这种技术提供的快速复制和原型制作将使研究设备和结构成为可能，否则这些设备和结构很难制造或制造成本高得令人望而却步。 NIL涉及1）地形或化学结构的物理模板化和2）随后的光或热引发的材料合成。该实验室的全面实施需要购买两台仪器，我们正在申请资金：一台来自Molecular Imprints，Inc.的步进和闪光NIL仪器。和来自Trion，Inc.该实验室对于多项研究活动的成功至关重要，这些研究活动涉及麻省大学的合作PI和NSF MRSEC的其他成员，包括开发用于纳米结构器件的先进材料（例如用于传感器的纳米级图案化表面，超低介电常数图案的单步处理，和用于电动车辆的高功率密度脉冲功率电容器）以及对限制在制造规模上实施NIL的挑战的基础研究。这些仪器将放置在开放的Keck纳米结构实验室中，并制定了全面的管理计划，以确保维护和广泛的用户群的可访问性。此外，NIL实验室将被纳入现有的纳米技术课程，其开放式管理计划将鼓励我们的REU和RET计划的参与者以及当地五所大学社区的教师和学生使用，其中包括两所女子学院：山。霍利奥克学院和史密斯学院。马萨诸塞大学阿默斯特分校是纳米材料科学领域的公认领导者，该设施将进一步确保我们在设备级实施我们的发现方面的领导地位，同时为学生提供现实世界纳米尺度制造的专业知识。马萨诸塞州阿默斯特大学的这一奖项将使校园内的研究人员以及当地社区和其他地方的研究人员，推进和扩大他们在尺寸小于十亿分之一米的材料研究方面的专业知识。这笔赠款将用于购买两种先进的技术仪器，这两种仪器将使材料的制备具有比人类头发直径小1000倍的用户定义模式。 这种能力将有助于化学传感器、更快、更稳定的计算机芯片以及电动汽车电源管理设备等新技术的开发。这个设施将是一个开放的中心，为教师和学生在马萨诸塞州和当地的大学社区，其中包括两个女子学院：山。霍利奥克学院和史密斯学院。一个全面的管理计划将确保可访问性，维护，并将这些仪器纳入材料研究课程，同时鼓励参与本科生研究经验和教师研究经验推广计划的非传统研究人员使用实验室。 麻省大学目前在纳米技术方面有许多令人兴奋的举措，这个实验室的建立将确保我们保持在尖端研究的最前沿。