STTR Phase II: Surface Plasmon Enhanced High Efficiency Near-Field Probes

STTR 第二阶段：表面等离激元增强型高效近场探头

• 批准号: 0522281
• 负责人: Russell Hollingsworth
• 金额: --
• 依托单位: ITN ENERGY SYSTEMS, INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0522281&HistoricalAwards=false
• 关键词: STTR; Phase; II; Surface; Plasmon

This Small Business Technology Transfer (STTR) Phase II project will further develop structures and manufacturing techniques for high efficiency near-field scanning optical microscope (NSOM) probes utilizing surface plasmon enhancement. Wavelength scale surface topography (gratings) in metal films allow coupling between surface plasmons at the metal interface and photons in free space, providing significant transmission enhancement through sub-wavelength apertures. Probes with 20 nanometers optical andtopographic resolution combined with power throughput greater than 10 microwatts are projected. This represents a factor of 5-10 improvement in resolution and a thousand fold improvement in transmission over existing tapered fiber NSOM probes. The program will include closely linked fabrication, theoretical modeling, and characterization activities to ensure efficient optimization. The plasmon structures will be integrated with optical fibers to produce NSOM probes that can be directly interchanged with existing tapered fiber probes. In addition to the primary development of improved NSOM probes, advancements to the fundamental scientific understanding of plasmon-optical interactions will aid in the future development of other plasmonic devices.Commercially the proposed program will enhance the capabilities of NSOM metrology instruments, which have wide applicability in nanotechnology development. Based on Phase I results, significant increases in measurement speed and improved resolution can be expected from this effort. The proposed effort is a key step in commercialization of a large area, high speed NSOM instrument. While this project focuses specifically on NSOM tips, plasmon optics have potential applications to a broad range of areas where high efficiency and subwavelength sizes are required including the integration of optics with microelectronics, spatial and spectral optical multiplexing, and data storage applications..

这个小企业技术转让（STTR）第二阶段项目将进一步开发利用表面等离子体增强的高效近场扫描光学显微镜（NSOM）探针的结构和制造技术。金属膜中的波长尺度表面形貌（光栅）允许金属界面处的表面等离子体激元与自由空间中的光子之间的耦合，从而通过亚波长孔径提供显著的透射增强。预计将有20纳米的光学和地形分辨率与大于10微瓦的功率吞吐量相结合的探头。这表示分辨率提高了5-10倍，传输比现有锥形光纤NSOM探头提高了一千倍。该计划将包括紧密联系的制造，理论建模和表征活动，以确保有效的优化。等离子体激元结构将与光纤集成，以产生可以与现有锥形光纤探针直接互换的NSOM探针。除了改进的NSOM探针的主要发展，进步的等离子体激元光学相互作用的基本科学认识将有助于在未来的发展，其他plasmonic设备。商业上，拟议的计划将提高NSOM计量仪器的能力，这在纳米技术的发展具有广泛的适用性。根据第一阶段的结果，可以预期，从这一努力的测量速度和提高分辨率显着增加。这是大面积、高速NSOM仪器商业化的关键一步。虽然该项目特别关注NSOM尖端，但等离子体光学在需要高效率和亚波长尺寸的广泛领域具有潜在的应用，包括光学与微电子学的集成，空间和光谱光学多路复用以及数据存储应用。