SBIR Phase II: Highly Efficient Exhaust Cleanup Technology for Environmentally Benign Processing

该小型企业创新研究（SBIR）第二阶段项目将开发一种新型的集成反应减排模型（IRAM），可有效去除原子层沉积（ALD）制造工艺废气中的固化化学品。 ALD和相关的制造技术广泛应用于电子工业，对新兴的纳米技术应用至关重要。 然而，一个关键的问题是反应性的，有毒的和固化的化学物质的排放，堵塞和破坏设备，需要频繁的清理和更换，并创建工人的安全和环境问题。本项目的目标包括开发合适的减排化学品和系统的几个重要的通用ALD工艺和推导出广义IRAM方法，可以用来生产一个模块，可以集成到ALD设备。

This Small Business Innovation Research (SBIR) Phase II project will develop a novel, integrated reactive abatement model (IRAM) that effectively removes solidifying chemicals from the exhaust effluent of atomic layer deposition (ALD) manufacturing processes. ALD and related manufacturing technologies are widely used in the electronics industry and will be critical for emerging nanotechnology applications. However, a key issue is the emission of reactive, toxic and solidfying chemicals that clog and destroy equipment, requiring frequent cleanup and replacement, and create worker safety and environmental concerns.Objectives of this project include developing suitable abatement chemistries and systems for several important generic ALD processes and deriving generalized IRAM methodology that can be used to produce a module that can be integrated into ALD equipment.