LiNbO3 Sub-Micron Film Technology- A New Approach to Guided Wave Nonlinear and Electro-optic Devices.

LiNbO3 亚微米薄膜技术 - 导波非线性和电光器件的新方法。

• 批准号: 0601339
• 负责人: William Steier
• 金额: $ 24万
• 依托单位: University of Southern California
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-06-01 至 2009-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0601339&HistoricalAwards=false
• 关键词: LiNbO3; Sub; Micron; Film; Technology

ECS-0601339W. Steier, Univ. of Southern CaliforniaResearch and Its Intellectual Merit A new technology has recently been demonstrated for the fabrication of sub-micron thick LiNbO3 buried ridge waveguides using crystal ion slicing and wafer bonding. It was shown that the transferred layers have bulk crystalline quality and have identical optical and electro-optical properties as lithium niobate single crystals. These new LiNbO3 thin films and waveguides are the key to the next generation of electro-optical and nonlinear optical devices proposed here. Because of the large index contrast, waveguides can be designed with several micron bending radius and can be integrated with other high index optical platforms such as Si-on-insulator. For parametric oscillators and other NLO devices, reducing the mode size increases the conversion efficiency, reduces the interaction length, and limits the effect of optical loss. For modulators, Vp can be significantly reduced because of the reduced electrode spacing and the rf bandwidth can be significantly increased by matching the optical and microwave signal velocities. The research includes studies of periodic poling of the thin films, studies of EO micro-ring amplitude or phase modulators, investigation of high speed EO traveling wave modulators, parametric oscillators, amplifiers, and analysis and fabrication of photonic band gap engineered devices. The application of the crystal ion slicing thin film technology to other notable nonlinear materials such as KNbO3, KTiOPO4, KTiOAsO4, and Ba2NaNb5O15 will be investigated. Broader Impact on Diversity and Out-Reach in Engineering and Engineering EducationIn collaboration with the School of Engineering Diversity program and graduate fellowship program, we will bring minority undergraduates into the lab as merit scholars and an additional women graduate student into my laboratory. As part of the educational outreach program established by USC and LA Trade Tech to educate community college students in clean room and nano-fabrication technology, we will us this work as a leading edge example of nano-fabrication and the devices made possible.

ECS-0601339W。斯坦尔大学南加州的研究及其智力价值最近证明了一种利用晶体离子切片和晶片键合制造亚微米厚LiNbO_3掩埋脊形光波导的新技术。结果表明，转移层具有块状晶体性质，并具有与LiNbO4单晶相同的光学和电光性质。这些新的LiNbO_3薄膜和波导是这里提出的下一代电光和非线性光学器件的关键。由于具有大的折射率对比度，可以设计出几个微米的弯曲半径，并可以与其他高折射率光学平台集成，如绝缘体上的硅。对于参量振荡器和其他NLO器件，减小模式尺寸可以提高转换效率，缩短相互作用长度，并限制光学损耗的影响。对于调制器，由于电极间距的减小，Vp可以显著降低，而通过匹配光和微波信号速度，可以显著增加RF带宽。研究包括薄膜的周期极化研究、电光微环幅度或相位调制器的研究、高速电光行波调制器、参数振荡器、放大器的研究，以及光子带隙工程器件的分析和制作。还将研究晶体离子切片薄膜技术在KNbO_3、KTiOPO_4、KTiO_AsO_4和Ba2NaNb_5O_(15)等著名非线性材料中的应用。工程和工程教育中多样性和外延的更广泛影响与工程学院多样性计划和研究生奖学金计划合作，我们将把少数族裔本科生作为优秀学者带入实验室，并将另外一名女性研究生带入我的实验室。作为南加州大学和洛杉矶贸易技术学院建立的教育推广计划的一部分，我们将把这项工作作为纳米制造和设备制造的前沿范例，向社区大学生传授无尘室和纳米制造技术。