On-Chip Gas Pumping With No Moving Parts

无移动部件的片上气体泵送

• 批准号: 0601453
• 负责人: Shamus McNamara
• 金额: $ 24万
• 依托单位: University of Louisville Research Foundation Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-06-01 至 2010-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0601453&HistoricalAwards=false
• 关键词: Chip; Gas; Pumping; No; Moving

0601453McNamaraThe objective of this research is to explore the use of gas pumps (compressors and vacuum pumps) for MEMS applications. The approach is to develop two types of gas pumps, the Knudsen pump and the accommodation pump, and to demonstrate the advantages of these gas pumps for pneumatic actuation. The Knudsen pump features no moving parts, is thermally driven, uses the principle of thermal transpiration as the basis of its operation, and utilizes sub-micron features to operate at atmospheric pressure, making it a perfect match for MEMS technology. The accommodation pump is also thermally driven and, although the efficiency is lower than that of a Knudsen pump, features no theoretical lower pumping limit.Intellectual merit: This research will permit the development of many devices, including better biomedical devices and miniature gas sensors. The biomedical devices will use on-chip pneumatic pumps to manipulate blood and tissue samples, resulting in better medical diagnosis. The theoretical efficiency of these pumps is sufficiently high that the results can be directed toward developing more energy-efficient pumps, enabling more efficient air conditioners and refrigerators. Broader Impact: The PI takes an active role in recruiting and preparing a new generation of scientists and engineers by mentoring high school students at several local high schools, and directing research projects for both undergraduate and graduate students. The results of the research will be widely disseminated in presentations at conferences and by publication in peer-reviewed journals, as well as by incorporation into courses taught at the University of Louisville.

0601453McNamara本研究的目的是探索使用气泵（压缩机和真空泵）的MEMS应用。 该方法是开发两种类型的气泵，努森泵和住宿泵，并证明这些气泵的气动驱动的优点。 Knudsen泵的特点是没有运动部件，是热驱动的，使用热蒸发原理作为其操作的基础，并利用亚微米特性在大气压下操作，使其成为MEMS技术的完美匹配。 该调节泵也是热驱动的，尽管其效率低于Knudsen泵，但其特点是没有理论上的泵送下限。智力价值：这项研究将允许开发许多装置，包括更好的生物医学装置和微型气体传感器。 生物医学设备将使用片上气动泵来操纵血液和组织样本，从而更好地进行医学诊断。 这些泵的理论效率足够高，其结果可以用于开发更节能的泵，从而实现更高效的空调和冰箱。 更广泛的影响：PI在招募和培养新一代科学家和工程师方面发挥了积极作用，在几所当地高中指导高中生，并指导本科生和研究生的研究项目。 研究结果将在会议上的演讲中广泛传播，并在同行评审的期刊上发表，以及纳入路易斯维尔大学教授的课程。