MRI: Acquisition of a Low Pressure Chemical Vapor Deposition System for Applications in Micro/Nano Technology

MRI：采购用于微/纳米技术应用的低压化学气相沉积系统

• 批准号: 0722789
• 负责人: Shamus McNamara
• 金额: --
• 依托单位: University of Louisville Research Foundation Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2011-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0722789&HistoricalAwards=false
• 关键词: MRI; Acquisition; Low; Pressure; Chemical

MRI: Acquisition of a Low Pressure Chemical Vapor Deposition System for Applications in Micro/NanoTechnologyDr. S. McNamara, University of LouisvilleThe objective of this research is to add a Low Pressure Chemical Vapor Deposition (LPCVD) system to the new nanofabrication cleanroom at the University of Louisville. This tool is used to deposit high quality thin films of polysilicon and silicon nitride (stoichiometric and low-stress) on silicon substrates.Intellectual merit: The LPCVD system will enable researchers at UofL to deposit stress-controlled thin films for a variety of research projects, including for nanotechnology (MEMS Origami), for electronic devices (transistors), for MEMS devices (on-chip gas pumping, piezoelectric sensor platform, gas phase preconcentrators for chemical detection, microfluidic devices for solid particle formation), for acoustic devices (broad-band frequency ultrasonic transducer arrays, miniature microphones), for optics (optical planar UV waveguides), and for bioMEMS (continuous apheresis, lab-on-a-chip).The broader impacts of this proposal include supporting an undergraduate microfabrication laboratory (ECE 101), a graduate microfabrication laboratory (ECE 544), supporting two minority PIs and one female PI, and supporting numerous minority students, female students, and students from economically disadvantaged regions in Kentucky. Outreach efforts include continued participation of high school students in the KY State Science Fair program and through the Biotech Fellows program. The LPCVD system will be utilized by its many external users, including students and researchers at both 4-year and research universities within and around Kentucky, national laboratories, local Kentucky industries, and cleanroom-related startup companies. Benefits to society include improvements in homeland security, environmental testing, bedside diagnostics, new and cheaper methods of manufacturing nanomaterials, and better tools for biomedical research.

MRI：微/纳米技术应用的低压化学气相沉积系统的收购。S. McNamara，路易斯维尔大学这项研究的目的是在路易斯维尔大学的新纳米纤维洁净室中增加一个低压化学气相沉积（LPCVD）系统。 该工具用于存款高质量的多晶硅和氮化硅薄膜（化学计量和低应力）的硅衬底上。LPCVD系统将使UofL的研究人员能够为各种研究项目（包括纳米技术）沉积存款应力控制薄膜（MEMS Origami），用于电子设备（晶体管），用于MEMS器件（芯片上气体泵送、压电传感器平台、用于化学检测的气相预浓缩器、用于固体颗粒形成的微流体装置），用于声学装置（宽带频率超声换能器阵列，微型麦克风），用于光学（光学平面UV波导），以及用于bioMEMS（连续单采，芯片实验室）。该提案的更广泛影响包括支持本科生微细加工实验室（ECE 101）、研究生微细加工实验室（ECE 544），支持两个少数民族PI和一个女PI，并支持许多少数民族学生，女学生，和学生从经济落后地区在肯塔基州。 外联工作包括高中生继续参与肯塔基州科学博览会计划和生物技术研究员计划。 LPCVD系统将被其许多外部用户使用，包括肯塔基州及其周边地区的四年制和研究型大学的学生和研究人员，国家实验室，当地肯塔基州工业和洁净室相关的初创公司。 对社会的好处包括改善国土安全，环境测试，床边诊断，制造纳米材料的新方法和更便宜的方法，以及更好的生物医学研究工具。