Acquisition of A Microsystem Analyzer for Integrated Research and Education in Dynamic Analysis, Surface Topography, and Characterization of Active Microstructures

摘要：这项多学科的主要研究仪器（MRI）奖支持获得基于高精度扫描振动计的运动分析和控制仪器MSA-400微系统分析仪，用于在克莱姆森大学建立一个集中的微结构设施。利用现有的基础设施和专业知识，该MRI将推进以下方面的研究：1)基于纳米管的致动器、传感器和基于薄膜的电子封装；Ii)表面和界面薄膜，制备聚合物薄膜；iii)用于生物物种检测的微悬臂传感器，以及生物分子及其组件的纳米机电特性。由于MSA-400的多技术特点，允许探索新概念的边缘是可能的，学生可以在他们选择的领域接受强化培训，同时发展相关学科的知识。这个集中的微结构设施，其中MSA-400是不可或缺的一部分，将推动8名高素质的教师（其中3名是NSF职业奖获得者）的集体努力，代表6个系和2个学院从事先进微结构的表征和制造。此次合作将创造一个跨部门，设备齐全的学习环境，将结构动力学和控制，表面工程，MEMS制造和封装，表面物理和地形，以及生物材料和生物传感器的研究与教育相结合。在过去项目成功模式的基础上，科学家、教师和学生的集体努力将为代表性不足和少数民族学生群体提供机会，使他们能够参与这项正在进行的合作研究工作。该计划的教育和推广部分将从这些群体中吸引全国的本科生和高中生。为了提高公众对纳米和微系统技术的认识，我们正在进行的由NIH和nsf赞助的克莱姆森生物信息学和生物工程暑期研究所（BBSI）将允许这些代表性不足的群体参与与本次MRI相关的研究活动。

AbstractThis multidisciplinary Major Research Instrumentation (MRI) award supports the acquisition of a high precision scanning vibrometer-based motion analysis and control instrument, the MSA-400 Micro System Analyzer, to establish a centralized microstructures facility at Clemson University. Using existing infrastructure and expertise, this MRI will advance research in i) nanotube-based actuators, sensors, and thin films-based electronic packaging; ii) surficial and interfacial films, fabrication of thin polymer films; and iii) microcantilever-based sensors for biological species detection, and nanoelectromechanical properties of biomolecules and their assemblies. Due to multiple-technology feature of the MSA-400 that permits the exploration of new concepts at the edge of what is possible, students can receive intensive training in their chosen field, while concurrently developing knowledge in related disciplines. This centralized microstructures facility, of which the MSA-400 is an integral part, will advance the collective efforts of 8 highly-qualified faculty members (3 of whom are NSF CAREER awardees) representing 6 departments and 2 colleges engaged in the characterization and fabrication of advance microstructures. This collaboration will create a cross-departmental, well-equipped learning environment that integrates research with education in structural dynamics and control, surface engineering, MEMS fabrication and packaging, surface physics and topography, as well as biological materials and biosensors. Building upon successful models used in past projects, this collective effort of scientists, teachers, and students will provide access to underrepresented and minority student groups to allow them to participate in this ongoing collaborative research effort. The educational and outreach component of this program will attract undergraduate and high school students nationwide from these groups. To increase public awareness of nano- and microsystem technologies, our ongoing NIH- and NSF-sponsored Bioinformatics and Bioengineering Summer Institute (BBSI) at Clemson will permit these underrepresented groups to participate in the research activities proposed in conjunction with this MRI.