Inversion-Based Nanopositioning Control For Ultra-high-speed Scanning Probe Microscopy

用于超高速扫描探针显微镜的基于反转的纳米定位控制

• 批准号: 0626417
• 负责人: Qingze Zou
• 金额: --
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-09-15 至 2011-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0626417&HistoricalAwards=false
• 关键词: Inversion; Based; Nanopositioning; Control; Ultra

In this GOALI project, a suite of novel control techniques based on the system-inversion theory will be developed to significantly increase the operation speed of scanning probe microscope (SPM) with large imaging size and large sample asperities. To achieve high-speed precision positioning during lateral scanning, an inversion-based iterative control (IIC) algorithm will be studied to simultaneously compensate-for the nonlinear hysteresis and the vibrational dynamics effects of piezo actuators. A cascade model consisting of the Preisach-based hysteresis model followed by the linear dynamics will be explored to investigate the convergence of the IIC algorithm. To achieve precision positioning of the AFM-probe in the vertical-axis, a novel two degree-of-freedom feedforward-feedback controller will be developed to enable the inversion-based feedforward controller and the robust feedback controller to work in concert. Furthermore, an optimal output transition technique that reduces output oscillations by minimizing the output-energy will be integrated with the IIC algorithm to achieve high-speed adhesion force measurement. The developed control techniques will be implemented and evaluated in a set of scientific and engineering studies, through the collaborations with the PI's colleagues at ISU.Developing ultra-high-speed SPM resonates with the grand challenge areas of nanotechnology ("Nanoscale Instrumentation and Metrology") identified by the National Nanotechnology Initiative. Ultra-high-speed SPM will revolutionize the use of SPM in numerous areas, including, but not limited to, biomedical imaging (e.g., study of rapid biological processes such as living cell locomotion), analytical chemistry (e.g., real-time monitoring of single-molecule reactions), nanomanufacturing (high-throughput manufacturing of nanodevices for practical uses), and bioassays. The proposed education and outreach activities of the project will stimulate women/minority students' interests in science/engineering areas at their early age through the Open-Lab tours and mentoring freshman undergraduates. The collaboration with Veeco, the industrial partner in this GOALI project, will enhance the graduate students' industry experience through summer internships, and accelerate the transfer of the developed technology to the industry.

在这个GOALI项目中，将开发一套基于系统反演理论的新型控制技术，以显着提高大成像尺寸和大样品粗糙度的扫描探针显微镜（SPM）的运行速度。为了在横向扫描过程中实现高速精确定位，将研究基于反演的迭代控制（IIC）算法，以同时补偿压电执行器的非线性迟滞和振动动力学效应。将探索由基于 Preisach 的磁滞模型和线性动力学组成的级联模型，以研究 IIC 算法的收敛性。为了实现 AFM 探针在垂直轴上的精确定位，将开发一种新颖的二自由度前馈-反馈控制器，以使基于反演的前馈控制器和鲁棒反馈控制器能够协同工作。此外，通过最小化输出能量来减少输出振荡的最佳输出转换技术将与 IIC 算法集成，以实现高速粘附力测量。所开发的控制技术将通过与 ISU 的 PI 同事合作，在一系列科学和工程研究中实施和评估。开发超高速 SPM 与国家纳米技术计划确定的纳米技术（“纳米仪器和计量”）的重大挑战领域产生共鸣。超高速SPM将彻底改变SPM在许多领域的使用，包括但不限于生物医学成像（例如，活细胞运动等快速生物过程的研究）、分析化学（例如，单分子反应的实时监测）、纳米制造（实际用途的纳米器件的高通量制造）和生物测定。该项目拟议的教育和外展活动将通过开放实验室参观和指导新生本科生，激发女性/少数民族学生在很小的时候对科学/工程领域的兴趣。此次与GOALI项目的行业合作伙伴Veeco的合作，将通过暑期实习增强研究生的行业经验，并加速已开发技术向行业的转移。