SBIR Phase I: Multipurpose and Multispectral Sensor for Geo-science and Astronomical Instruments

该SBIR第一阶段研究项目将开发具有高量子效率、高速的单片MEMS传感器阵列，用于众多系统应用。今天的传感器阵列被设计为在可见光或近红外区域工作。这些都不能提供宽光谱响应（300 nm至2500 nm）。目标是确定合适的传感器阵列结构，用于宽范围检测，同时具有高量子效率和高速度。第二个目标是识别光电二极管或传感器阵列结构，其中每个像素可以独立寻址。该研究的广泛影响是，各种地基、机载和星载地球科学仪器都需要宽光谱图像传感器，用于大气特性测量、表面形貌测量、距离探测、遥感和生物系统实时监测。到目前为止，覆盖不同光谱范围的几种传感器用于此目的。下一代地球科学和天文仪器需要能够探测多个光谱带（波长为300至2500纳米）的单一传感器，并可用于多个地球科学测量。使用具有多功能能力的单个传感器可以使仪器非常小，轻和低功耗的要求。

This SBIR Phase I research project will develop monolithic multicolor sensor array with high quantum efficiency, high speed for numerous system applications. Today's sensor arrays are designed to work either in visible or in near infrared region. None of these can provide broad spectral response (300 nm to 2500 nm). The goal is to identify suitable sensor array structures for broad range detection, with combined high quantum efficiency, and high speed. A second goal is to identify a photodiode or sensor array structure where each pixel can be addressed independently. The design, performance simulation, and also physical parameters optimization will also be carried out as a part of this research activity.The broader impact of this research is that broad spectral image sensors are required for various ground-based, air-borne, space-borne geo-science instruments for the atmospheric properties measurement, surface topography, range detection, remote sensing, and real-time monitoring of biological systems. To date, several sensors covering different spectral ranges are used for this purpose. Next generation geo-science and astronomical instrumentation require single sensor that can detect multiple spectral bands (300 to 2500 nm of wavelengths) and could be used for multiple earth-science measurements. Use of single sensor having multifunctional capability can make the instrument unusually small, light and low-power requirement.