STTR Phase I: Scanning Magnetic Microscope using a Ferromagnetic Flux-Guide Coupled to a SQUID for Nanoscale Current Imaging of Integrated Circuits

STTR 第一阶段：使用与 SQUID 耦合的铁磁磁通导扫描磁显微镜对集成电路进行纳米级电流成像

• 批准号: 0638011
• 负责人: Antonio Orozco
• 金额: $ 14.96万
• 依托单位: NEOCERA, LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0638011&HistoricalAwards=false
• 关键词: STTR; Phase; Scanning; Magnetic; Microscope

This Small Business Technology Transfer (STTR) Phase I project will develop a hybrid scanning-SQUID microscope coupled to a magnetic flux-guide to achieve nanoscale imaging of weak buried currents in a large range of packaged microelectronic devices. The manufacture of integrated circuits has become an increasingly complex nanoscale technology. With these dimensions, the propensity for the formation of shorts or high resistance defects (resistive opens) at the metal layers is increasing where "killer defects" may be non-visual and only be a few tens of nanometers in size. This is leading the industry toward a gap between the fault isolation tools of today (many of which are optical and wavelength-limited to 500 nm resolution) and the atomic scale defect imaging tools like AFMs and STMs. The needed tools must have nanoscale resolution and a probe geometry capable of working in milled cavities due to the complex packaging schemes. The goals of this Phase I project are to achieve current images with a sensitivity of ~50 nA and a resolution ~100 nm in milled cavities. This will be achieved through innovative probe design optimized for sensitivity with a submicron tip that can be rapidly scanned in a non-contact mode. Commercially, the technology development that is proposed in this program is of critical interest to major semiconductor manufacturers, as well as all other semiconductor manufacturers working on advanced integrated circuits. For semiconductor companies it will enable the design centers to speed design, Fab labs to accelerate manufacturing process development for new products, and to accelerate time-to-yield. Overall, it means faster time-to-market. For the nation, it means faster introduction of advanced electronics that will have a broad impact across all industries and ultimately improve quality of life and labor productivity.

这项小型企业技术转移（STTR）第一阶段项目将开发一种与磁导耦合的混合扫描- squid显微镜，以实现大范围封装微电子设备中弱埋流的纳米级成像。集成电路的制造已经成为越来越复杂的纳米级技术。有了这些尺寸，在金属层形成短路或高电阻缺陷（电阻开口）的倾向正在增加，其中“致命缺陷”可能是看不见的，尺寸只有几十纳米。这导致了目前的故障隔离工具（其中许多是光学的，波长限制在500纳米分辨率）与原子尺度缺陷成像工具（如afm和stm）之间的差距。由于复杂的封装方案，所需的工具必须具有纳米级分辨率和能够在铣削腔中工作的探针几何形状。这个第一阶段项目的目标是实现在铣削腔中具有~50 nA灵敏度和~100 nm分辨率的当前图像。这将通过创新的探针设计来实现，其灵敏度优化为亚微米尖端，可以在非接触模式下快速扫描。在商业上，该计划中提出的技术发展对主要半导体制造商以及所有其他致力于先进集成电路的半导体制造商至关重要。对于半导体公司来说，它将使设计中心加快设计，Fab实验室加快新产品的制造工艺开发，并加快生产时间。总的来说，这意味着更快的上市时间。对国家来说，这意味着更快地引进先进的电子产品，这将对所有行业产生广泛的影响，并最终提高生活质量和劳动生产率。