Design and Creation of Nanomechanical Architectures from Folding of Ultrathin Bi-layer Films

未来的纳米技术要求纳米制造技术的发展具有新的设计原则和更高的控制程度。拟议的研究计划将探索一种新颖而通用的方法，通过应变双层薄膜的纳米机械结构范例来制造纳米结构。它将应用多尺度的理论和计算方法来研究超薄应变双层薄膜机械弯曲形成各种三维纳米结构的基本原理。这项研究计划将协同理论和计算工作与强大的实验协作相结合，将涵盖三个互补的研究领域：Al过程实验合作包括利用Si/SiGe应变双层薄膜制备和表征新型纳米结构。将被用于智能优点：科学目标是获得对复合层状薄膜结构的纳米力学性质的基本了解，并建立一种新颖和通用的纳米制造方法的设计原则，即纳米机械结构。拟议的计划还将在表面重建和化学键方面增加我们对原子水平上的应力/应变的理解。更广泛的影响：这个研究项目的一个目标和自然结果是对学生的教育。这将丰富犹他大学PI最近开发的一门关于纳米材料和纳米力学的新课程。该计划中开发的一些计算技术将作为开放和共享的资源提供给广大研究和教育人员。我们将通过与犹他州科学中心合作的教育和外展活动，有意识地努力宣传拟议的工作。这些努力将对公众进行纳米科学和纳米技术的教育产生重大影响，纳米科学和纳米技术被认为是21世纪的主要经济刺激之一。

The nanotechnology of the future demands the development of nanofabrication techniques with new principles of design and higher degrees of control. The proposed research program will explore a novel and versatile approach for fabricating nanostructures via a paradigm of nanomechanical architecture of strained bi-layer films. It will apply multi-scale theoretical and computational methods to investigate the fundamental principles governing the formation of a variety of three-dimensional nanostructures resulting from mechanical bending of ultrathin strained bi-layer films.The reseach program, combining synergistically theoretical and computational efforts with strong experimental collaboration, will cover three complementary research areas: al process Experimental collaboration includes fabrication and characterization of novel nanoarchitectures using Si/SiGe strained bi-layer thin films.Swill be used Intellectual Merit: The scientific objective is to obtain fundamental understanding of the nanomechanical properties of composite layered thin-film structures and to establish design principles for a novel and versatile approach for nanofabrication, i.e., the nanomechanical architecture. The proposed program will also increase our understanding of stress/strain at the atomic level in terms of surface reconstruction and chemical bonding. Broader Impacts: A goal and natural outcome of this research program is the education of students. It will enrich a new course on nanomaterials and nanomechanics, developed recently by the PI at University of Utah. Some computational techniques developed in this program will be made available as open and shared resources for research and education at large. Conscious efforts will be made to publicize the proposed work, by our educational and outreach activity collaborating with Utah Science Center. These efforts will make significant impact on educating the general public about nanoscience and nanotechnology, which is considered as one major economic stimulus of the 21st century.