Near-Field-Controlled Nanoscale Coating of Functional Thin Films for Nanodevices

用于纳米器件的功能薄膜的近场控制纳米级涂层

• 批准号: 0652905
• 负责人: Yongfeng Lu
• 金额: $ 24万
• 依托单位: University of Nebraska-Lincoln
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-04-15 至 2011-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0652905&HistoricalAwards=false
• 关键词: Near; Field; Controlled; Nanoscale; Coating

Near-Field-Controlled Nanoscale Coating of Functional Thin Films for NanodevicesUniversity of Nebraska-Lincoln Lu, Yongfeng - 402-472-8323 =========================================================The Objective of the proposed research is to develop a novel surface process employing near-field photochemical process for self-controlled deposition of functional thin films on nanodevices. The project objectives are to 1) simulate nanoscale local light enhancement by nanodevices; 2) detect near-field-enhanced photochemistry; 3) deposit diamond-like carbon (DLC) films on nanoelectromechanical (NEMS) devices using laser-assisted chemical vapor deposition; and 4) characterize tribological performance of DLC-coated NEMS.Intellectual merit:The proposed research is to utilize optical near-fields as local energy sources for chemical reactions. It is a controllable surface process which extends surface coating to 3-D nanostructures. Fundamental understanding of nanoscale material deposition by highly spatially confined EM wave is of major scientific interests. It is a technique directly addressing the needs for coatings on sharp tips and edges of nanostructures, especially as self-lubricating and protective coatings for extensive wear applications at nanometric levels. Broader Impact:This research will benefit the society by revolutionizing the efficiency, cost, and positioning accuracy of coating functional thin films on 3-D nanostructures which have wide applications such as semiconductor, photonics, electronics, and consumer products. Research outputs will be disseminated via a website and through different conferences. Students from underrepresented groups will work on the proposed project. The research results will be integrated into an existing undergraduate/graduate course "Introduction to Nanotechnology." An animation kit showing the applications of NEMS and basic ideas on the thin film deposition at the nanoscale will be developed and distributed to K-12 teachers and students in annual public seminars.

用于纳米器件的功能薄膜的近场控制纳米涂层内布拉斯加大学林肯路，本研究的目的是开发一种新型的表面处理方法，用于在纳米器件上自控沉积功能薄膜的场光化学方法。该项目的目标是：1）模拟纳米器件的纳米级局部光增强; 2）检测近场增强光化学; 3）使用激光辅助化学气相沉积在纳米机电（NEMS）设备上存款类金刚石（DLC）薄膜;以及4）表征DLC涂层NEMS.Intellectual优点的摩擦学性能：拟议的研究是利用光学近场作为化学反应的局部能源。它是一种可控的表面过程，将表面涂层扩展到3-D纳米结构。利用高度空间受限的电磁波沉积纳米材料具有重要的科学意义。这是一种直接解决纳米结构尖端和边缘涂层需求的技术，特别是作为纳米级广泛磨损应用的自润滑和保护涂层。更广泛的影响：这项研究将通过彻底改变在3D纳米结构上涂覆功能薄膜的效率，成本和定位精度来造福社会，这些纳米结构具有广泛的应用，如半导体，光子学，电子和消费品。研究成果将通过网站和各种会议传播。来自代表性不足群体的学生将参与拟议的项目。研究成果将被纳入现有的本科/研究生课程“纳米技术导论”。“我们会制作一套动画教材，介绍NEMS的应用和纳米尺度薄膜沉积的基本概念，并在每年的公开研讨会上分发给中小学教师和学生。