Near-Field-Controlled Nanoscale Coating of Functional Thin Films for Nanodevices

用于纳米器件的功能薄膜的近场可控纳米涂层本研究的目标是开发一种利用近场光化学过程在纳米器件上自控沉积功能薄膜的新的表面工艺。该项目的目标是：1)用纳米器件模拟纳米尺度的局部光增强；2)探测近场增强的光化学；3)利用激光辅助化学气相沉积在纳米机电(NEMS)器件上沉积类金刚石(DLC)薄膜；4)表征DLC涂层的摩擦学性能。这是一种可控的表面过程，将表面涂层延伸到三维纳米结构。对高度空间受限的电磁波沉积纳米材料的基本认识具有重大的科学意义。这是一种直接满足纳米结构尖端和边缘涂层需求的技术，特别是作为纳米级广泛磨损应用的自润滑和保护性涂层。更广泛的影响：这项研究将通过革命性地在半导体、光子学、电子和消费产品等广泛应用的三维纳米结构上镀膜功能薄膜的效率、成本和定位精度，从而造福社会。研究成果将通过一个网站和不同的会议传播。来自代表人数不足的群体的学生将参与拟议的项目。研究成果将整合到现有的本科生/研究生课程“纳米技术导论”中。将制作一个动画工具包，展示纳米级薄膜沉积的应用和基本概念，并在每年的公开研讨会上分发给K-12教师和学生。

Near-Field-Controlled Nanoscale Coating of Functional Thin Films for NanodevicesUniversity of Nebraska-Lincoln Lu, Yongfeng - 402-472-8323 =========================================================The Objective of the proposed research is to develop a novel surface process employing near-field photochemical process for self-controlled deposition of functional thin films on nanodevices. The project objectives are to 1) simulate nanoscale local light enhancement by nanodevices; 2) detect near-field-enhanced photochemistry; 3) deposit diamond-like carbon (DLC) films on nanoelectromechanical (NEMS) devices using laser-assisted chemical vapor deposition; and 4) characterize tribological performance of DLC-coated NEMS.Intellectual merit:The proposed research is to utilize optical near-fields as local energy sources for chemical reactions. It is a controllable surface process which extends surface coating to 3-D nanostructures. Fundamental understanding of nanoscale material deposition by highly spatially confined EM wave is of major scientific interests. It is a technique directly addressing the needs for coatings on sharp tips and edges of nanostructures, especially as self-lubricating and protective coatings for extensive wear applications at nanometric levels. Broader Impact:This research will benefit the society by revolutionizing the efficiency, cost, and positioning accuracy of coating functional thin films on 3-D nanostructures which have wide applications such as semiconductor, photonics, electronics, and consumer products. Research outputs will be disseminated via a website and through different conferences. Students from underrepresented groups will work on the proposed project. The research results will be integrated into an existing undergraduate/graduate course "Introduction to Nanotechnology." An animation kit showing the applications of NEMS and basic ideas on the thin film deposition at the nanoscale will be developed and distributed to K-12 teachers and students in annual public seminars.