Fabrication of Flexible Electronics by Laser-Aided Processing of Nanoparticles

通过纳米颗粒激光辅助加工制造柔性电子产品

• 批准号: 0700827
• 负责人: Costas Grigoropoulos
• 金额: $ 30万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-05-01 至 2010-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0700827&HistoricalAwards=false
• 关键词: Fabrication; Flexible; Electronics; Laser; Aided

The project concerns the fabrication of high-performance flexible electronics by utilizing laser processing of nanoparticle suspensions in conjunction with direct micro-printing. Laser sintering and ablation of inkjet printed metal nanoparticles enables low temperature metal deposition as well as high-resolution patterning, thus overcoming the resolution limitation of inkjet direct writing without any lithography processes. Combined with air stable carboxylate-functionalized polythiophene, all-printed and laser processed organic field effect transistors (OFETs) with micron to submicron critical feature resolution will be fabricated in a fully maskless sequence, eliminating the need for any lithographic processes. All processing and characterization steps will be carried out at plastic-compatible low temperatures. The fabricated devices will be characterized in order to optimize the performance in terms of the channel size, the air stable semiconductor material, the short channel effect and the channel roughness. To increase reliability, the thickness uniformity of the printed dielectric layer will be improved.For fundamental understanding and ultimately for process optimization, both experimental and theoretical investigations will be conducted on the physical mechanisms of the laser light interaction with the nanoparticle material. Temporally and spectrally resolved monitoring techniques, including far-field and near-field optical probing will be performed to interrogate the phase transition, particle deformation, sintering and ablation processes. In-situ transmission electron microscopy (TEM) studies will carried out to directly image the bonding sequence with nanometer resolution. Molecular dynamics (MD) simulations will be carried out in coordination with the experimental work to investigate the phase transition and sintering processes. To facilitate the numerical simulations, thermal, optical and electrical properties of the nanomaterial will be measured. Broader ImpactThe reduced temperature, laser-based processing of metal nanoparticles eliminates the need for lithographic processes and opens the way to the low-cost, maskless fabrication of high-resolution, electronic devices on flexible substrates. Prime candidates for the utilization of the technology developed in this project include the manufacture of displays and large area electronics, interconnections, crossover conductors, capacitors, antennae, chemical sensors and active electrical components on flexible substrates. A spectrum of potential applications can be envisioned for the fabrication of sensors and devices based on magnetic, ceramic and semiconductor nanoparticles. The scientific research outcome is expected to shed light on complex phenomena involved in the laser interactions with nanoparticle materials. Specifically, it will elucidate the energy transfer, melting, sintering and ablation processes under laser excitation.

该项目涉及利用纳米颗粒悬浮液的激光加工与直接微印刷相结合，制造高性能柔性电子产品。激光烧结和烧蚀的喷墨打印金属纳米颗粒实现了低温金属沉积和高分辨率的图案，从而克服了喷墨直接书写的分辨率限制，无需任何光刻工艺。与空气稳定的羧酸功能化聚噻吩相结合，具有微米至亚微米临界特征分辨率的全印刷和激光加工有机场效应晶体管（ofet）将以完全无掩模顺序制造，从而消除了任何光刻工艺的需要。所有的加工和表征步骤将在塑料兼容的低温下进行。为了在通道尺寸、空气稳定半导体材料、短通道效应和通道粗糙度方面优化性能，将对所制备的器件进行表征。为了提高可靠性，需要改善印刷介质层的厚度均匀性。为了从根本上理解并最终优化工艺，将对激光与纳米颗粒材料相互作用的物理机制进行实验和理论研究。时间和光谱分辨监测技术，包括远场和近场光学探测，将执行询问相变，颗粒变形，烧结和烧蚀过程。原位透射电子显微镜（TEM）研究将以纳米分辨率直接成像键合序列。分子动力学（MD）模拟将与实验工作协同进行，以研究相变和烧结过程。为了便于数值模拟，将测量纳米材料的热学、光学和电学性质。更广泛的影响降低温度，基于激光的金属纳米颗粒加工消除了对光刻工艺的需求，并为在柔性基板上低成本，无掩膜制造高分辨率电子设备开辟了道路。本项目开发的技术的主要应用领域包括显示器和大面积电子产品的制造、互连、交叉导体、电容器、天线、化学传感器和柔性基板上的有源电子元件。基于磁性、陶瓷和半导体纳米颗粒的传感器和设备的制造可以设想一系列潜在的应用。这一科学研究成果有望揭示激光与纳米粒子材料相互作用的复杂现象。具体来说，它将阐明激光激发下的能量传递、熔化、烧结和烧蚀过程。