NIRT: Active Nanostructures with Giant Piezo-response

07087559张范威斯康星大学麦迪逊分校具有巨大压电响应的主动纳米结构智力优势：随着机电系统向纳米级（纳米机电系统，或NEMS）的发展，集成密度要求更快、更大的相对运动范围，主要挑战正在出现。我们最近开发的直接在硅上的巨型压电外延薄膜可以大大增加运动范围和速度，通过使用工程化的纳米级应变分布和域结构，甚至可能有更大的响应。我们将把巨型压电材料的外延薄膜异质结构直接集成在硅上，制成超活跃的纳米机电系统。这些异质结构与硅纳米加工工艺兼容，可以与硅基电子器件集成，并且具有足够大的响应，可以彻底改变主动NEMS执行器。本研究将对有源纳米级机电器件中的纳米级压电现象，以及高性能信号处理、通信、传感器和纳米定位致动器的应用，提供基本的科学理解。本文研究的压电响应与纳米尺度应变和畴结构之间的关系可以应用于多功能材料中，以开发新的NEMS器件。更广泛的影响：本研究将解决控制NEMS器件中压电材料纳米级性能的基本问题。通过这项研究，未来几代NEMS设备可能会得到广泛的应用，并为社会的许多方面带来技术进步。我们的教育目标是为所有学生提供广泛的经验。这包括一年级学生通过研究小组进行轮转，在国际和工业实验室工作，与不同背景的个人进行研究互动，以及参与外展计划。在推广活动中，来自波多黎各马亚圭斯的中学科学教师每年夏天将被带到威斯康星大学麦迪逊分校进行纳米技术学习/研究体验。他们将开发英语和西班牙语的课堂材料，并为全国各地的中学制定实施方案。研究生将作为教师的导师参与。

0708759Chang-Beom EomUniversity of Wisconsin-MadisonActive Nanostructures with Giant Piezo-responseIntellectual Merit: Major challenges are emerging as electromechanical systems move to the nano-scale (nanoelectromechanical systems, or NEMS), with an integration density that demands faster and larger relative motion range. Our recently developed giant piezoelectric epitaxial thin-films directly on silicon can drastically increase the motion range and speed, with even potentially greater response by using engineered nanoscale strain distributions and domain structures. We will integrate epitaxial thin film heterostructures of giant piezoelectric materials directly on silicon to make hyper-active nano-electromechanical systems. These heterostructures are compatible with silicon nanofabrication processes, can be integrated with silicon-based electronics, and have large enough response to revolutionize active NEMS actuators. This research will develop a fundamental scientific understanding of nanoscale piezoelectric phenomena in active nanoscale electromechanical devices, with applications in high performance signal processing, communications, sensors, and nano-positioning actuators. The relationship between piezo-response and nanoscale strain and domain configurations developed here can be applied to multifunctional materials to develop new NEMS devices. Broader Impacts: This research will resolve the fundamental issues that control nanoscale performance of piezoelectric materials in NEMS devices. Future generations of NEMS devices enabled by this research are likely to find wide-ranging applications and bring technological advances to many parts of society. Our Education goal is a broad experience for all students. This includes first-year student rotation through research groups, working in international and industrial laboratories, research interactions with individuals of diverse backgrounds, and participating in outreach programs. In Outreach, secondary school science teachers from Mayaguez, Puerto Rico will be brought to UW-Madison each summer for a nanotechnology learning/research experience. They will develop classroom material in both English and Spanish, and put in place programs for implementation secondary schools across the country. Graduate students will be involved as mentors to the teachers.