NIRT: Active Nanostructures with Giant Piezo-response

0708759 Chang-Beom Eom Eom威斯康星大学麦迪逊分校具有巨压电响应的有源纳米结构智能优势：随着机电系统向纳米级(纳米机电系统，或NEMS)发展，出现了重大挑战，集成密度要求更快和更大的相对运动范围。我们最近开发的直接在硅上生长的巨型压电外延薄膜可以极大地提高运动范围和速度，通过使用工程设计的纳米级应变分布和磁区结构，甚至可能获得更大的响应。我们将把巨型压电材料的外延薄膜异质结构直接集成在硅上，形成超活性的纳米机电系统。这些异质结构与硅纳米制造工艺兼容，可以与硅基电子设备集成，并具有足够大的响应，足以使有源NEMS驱动器发生革命性变化。这项研究将对有源纳米机电器件中的纳米级压电现象有一个基本的科学认识，并在高性能信号处理、通信、传感器和纳米定位致动器中得到应用。本文所建立的压电响应与纳米应变之间的关系以及电畴结构可以应用于多功能材料来开发新的NEMS器件。更广泛的影响：这项研究将解决在NEMS设备中控制纳米级压电材料性能的根本问题。通过这项研究实现的未来几代NEMS设备可能会找到广泛的应用，并为社会的许多领域带来技术进步。我们的教育目标是为所有学生提供广泛的体验。这包括通过研究小组轮换一年级学生，在国际和工业实验室工作，与不同背景的人进行研究互动，以及参与外展计划。在外展，每年夏天，来自波多黎各马亚圭斯的中学科学教师将被带到威斯康星大学麦迪逊分校进行纳米技术学习/研究体验。他们将开发英语和西班牙语的课堂材料，并为全国各地的中学实施计划。研究生将作为教师的导师参与其中。

0708759Chang-Beom EomUniversity of Wisconsin-MadisonActive Nanostructures with Giant Piezo-responseIntellectual Merit: Major challenges are emerging as electromechanical systems move to the nano-scale (nanoelectromechanical systems, or NEMS), with an integration density that demands faster and larger relative motion range. Our recently developed giant piezoelectric epitaxial thin-films directly on silicon can drastically increase the motion range and speed, with even potentially greater response by using engineered nanoscale strain distributions and domain structures. We will integrate epitaxial thin film heterostructures of giant piezoelectric materials directly on silicon to make hyper-active nano-electromechanical systems. These heterostructures are compatible with silicon nanofabrication processes, can be integrated with silicon-based electronics, and have large enough response to revolutionize active NEMS actuators. This research will develop a fundamental scientific understanding of nanoscale piezoelectric phenomena in active nanoscale electromechanical devices, with applications in high performance signal processing, communications, sensors, and nano-positioning actuators. The relationship between piezo-response and nanoscale strain and domain configurations developed here can be applied to multifunctional materials to develop new NEMS devices. Broader Impacts: This research will resolve the fundamental issues that control nanoscale performance of piezoelectric materials in NEMS devices. Future generations of NEMS devices enabled by this research are likely to find wide-ranging applications and bring technological advances to many parts of society. Our Education goal is a broad experience for all students. This includes first-year student rotation through research groups, working in international and industrial laboratories, research interactions with individuals of diverse backgrounds, and participating in outreach programs. In Outreach, secondary school science teachers from Mayaguez, Puerto Rico will be brought to UW-Madison each summer for a nanotechnology learning/research experience. They will develop classroom material in both English and Spanish, and put in place programs for implementation secondary schools across the country. Graduate students will be involved as mentors to the teachers.