MRI: Acquisition of a Thin Film Deposition System - Supporting Nanoscience and Nanotechnology Research and Education

MRI：购买薄膜沉积系统 - 支持纳米科学和纳米技术研究与教育

• 批准号: 0722660
• 负责人: Jun Jiao
• 金额: $ 29.46万
• 依托单位: Portland State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0722660&HistoricalAwards=false
• 关键词: MRI; Acquisition; Thin; Film; Deposition

The objective of this project is to acquire a thin film deposition (TFD) system to support funded research and to advance nanomaterials and nanofabrication development at Portland State University (PSU), as well as at surrounding institutions. The approach is that a KJLC AXXIS TFD system, capable of magnetron sputtering, electron beam deposition, thermal evaporation, ion beam-assisted deposition and substrate cleaning, will be installed at PSU's Center for Electron Microscopy and Nanofabrication (CEMN), a signature multi-user facility of Oregon Nanoscience and Microtechnologies Institute (ONAMI).The intellectual merit of this project is that the unique capabilities provided by the AXXIS TFD system, not currently available at any Oregon university, will enable researchers from ONAMI to conduct funded research and to initiate many nanoscience and nanotechnology related projects. In addition, it will stimulate collaboration among researchers across different university campuses in Oregon, creating new partnerships with local high-tech industry and improving the educational curriculum in thin film physics and surface coating technology for both graduate and undergraduate students. The new instrument will enhance the research infrastructure at PSU and ONAMI. The broader impact reflects the fact that more than two-dozen currently funded multi-disciplinary NSF, DOD, and DOE projects, representing more than 70 researchers, graduate and undergraduate students in 3 large universities in Oregon, will benefit directly from the new TFD system. The competitiveness and feasibility of many funded and new proposals by ONAMI members, covering areas from nanoelectronics, nanometrology, and nanofabrication to bioengineering, will be greatly enhanced.

该项目的目标是获得一个薄膜沉积（TFD）系统，以支持资助的研究，并推进波特兰州立大学（PSU）以及周边机构的纳米材料和纳米纤维的发展。该方法是，KJLC AXXIS TFD系统，能够磁控溅射，电子束沉积，热蒸发，离子束辅助沉积和基板清洁，将安装在PSU的电子显微镜和纳米纤维中心（CEMN），俄勒冈州纳米科学和微技术研究所（ONAMI）的标志性多用户设施该项目的智力价值在于AXXIS TFD系统提供的独特能力，目前在任何俄勒冈州大学都不可用，将使ONAMI的研究人员能够进行资助的研究，并启动许多纳米科学和纳米技术相关的项目。此外，它还将促进俄勒冈州不同大学校园的研究人员之间的合作，与当地高科技行业建立新的伙伴关系，并改善研究生和本科生的薄膜物理和表面涂层技术教育课程。新仪器将加强PSU和ONAMI的研究基础设施。更广泛的影响反映了这样一个事实，即超过24个目前资助的多学科NSF，DOD和DOE项目，代表俄勒冈州3所大型大学的70多名研究人员，研究生和本科生，将直接受益于新的TFD系统。ONAMI成员的许多资助和新提案的竞争力和可行性将大大提高，涵盖从纳米电子学，纳米计量学和纳米纤维到生物工程的领域。