MRI: Acquisition of a Hybrid Sputtering/e-beam Thin Film Deposition System for Research and Education

MRI：采购用于研究和教育的混合溅射/电子束薄膜沉积系统

• 批准号: 1229208
• 负责人: Hao Zeng
• 金额: $ 38.27万
• 依托单位: SUNY at Buffalo
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-09-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1229208&HistoricalAwards=false
• 关键词: MRI; Acquisition; Hybrid; Sputtering; beam

This award to the State University of New York at Buffalo (UB) is for the acquisition of a hybrid sputtering/e-beam thin film deposition system. The instrument will be used by an interdisciplinary group of UB faculty from four different departments: Physics, Chemistry, Chemical & Biological Engineering, and Electrical Engineering. The instrument is capable of depositing multilayer thin films combining metal, semiconductor, and insulator materials, in situ device fabrication and in situ characterization of a broad range of physical properties. It will enable the exploration of novel energy-related materials and devices, spin effects and materials in solid state devices, electronic materials and sensors, and optical materials. These materials and devices will contribute to applications ranging from solar cells and batteries, data storage to biological sensing. The hybrid sputtering/e-beam thin film deposition system will foster cross-disciplinary interactions, and realize previously undiscovered synergies in research. It is an important addition to UB's material research infrastructure and is a key priority for the newly planned Materials Science and Engineering Ph.D. program as it will help to attract new faculty members from various fields strategic to the University. The instrument will be house in the Integrated Nanostructured Systems Instrument Facility where it will be available to the broader UB research community and regional companies and institutions. A large number of post-doctoral scholars, and graduate and undergraduate students will gain hands-on experience in the operation and maintenance of what has become an essential tool in modern materials research. A new course will be developed concentrating on nanoscale materials and devices. The PIs will work closely with Buffalo State College and UB's Cora P. Maloney College to involve underrepresented groups in research using the instrument.

该奖项授予纽约州立大学布法罗分校(UB)，以表彰其收购了一种混合溅射/电子束薄膜沉积系统。该仪器将由来自四个不同系的UB教员组成的跨学科小组使用：物理、化学、化学和生物工程以及电气工程。该仪器能够沉积结合了金属、半导体和绝缘材料的多层薄膜、原位器件制造和多种物理性能的原位表征。它将使探索与能源有关的新材料和器件、自旋效应和固态器件中的材料、电子材料和传感器以及光学材料成为可能。这些材料和设备将有助于从太阳能电池和电池、数据存储到生物传感的各种应用。混合溅射/电子束薄膜沉积系统将促进跨学科的相互作用，并在研究中实现以前未发现的协同效应。这是对密歇根大学材料研究基础设施的重要补充，也是新计划的材料科学和工程博士项目的关键优先事项，因为它将有助于吸引来自不同战略领域的新教师到该大学。该仪器将放置在集成纳米结构系统仪器设施中，在那里它将提供给更广泛的UB研究界和区域公司和机构。大量博士后学者以及研究生和本科生将获得操作和维护现代材料研究中必不可少的工具的实践经验。将开发一门专注于纳米材料和设备的新课程。PIS将与布法罗州立大学和德克萨斯大学的科拉·P·马洛尼学院密切合作，让代表不足的群体参与使用该仪器的研究。