MRI: Acquisition of a Hybrid Sputtering/e-beam Thin Film Deposition System for Research and Education

该奖项授予纽约州立大学布法罗分校（UB），用于获得混合溅射/电子束薄膜沉积系统。该仪器将由布法罗大学物理系、化学系、化学与生物工程系和电子工程系四个不同系的跨学科小组使用。该仪器能够沉积结合金属，半导体和绝缘体材料的多层薄膜，现场器件制造和广泛物理性质的现场表征。它将使探索新的能源相关材料和器件、自旋效应和固态器件中的材料、电子材料和传感器以及光学材料成为可能。这些材料和设备将有助于应用范围从太阳能电池和电池，数据存储到生物传感。混合溅射/电子束薄膜沉积系统将促进跨学科的相互作用，并在研究中实现以前未发现的协同效应。这是UB材料研究基础设施的重要补充，也是新计划的材料科学与工程博士项目的关键优先事项，因为它将有助于吸引来自各个领域的新教师对大学具有战略意义。该仪器将被安置在集成纳米结构系统仪器设施中，在那里它将被更广泛的UB研究社区和地区公司和机构使用。大量博士后学者、研究生和本科生将获得操作和维护的实践经验，这已成为现代材料研究的重要工具。将开设一门新的课程，集中于纳米材料和器件。pi将与布法罗州立学院和UB的Cora P. Maloney学院密切合作，让代表性不足的群体参与使用该工具的研究。

This award to the State University of New York at Buffalo (UB) is for the acquisition of a hybrid sputtering/e-beam thin film deposition system. The instrument will be used by an interdisciplinary group of UB faculty from four different departments: Physics, Chemistry, Chemical & Biological Engineering, and Electrical Engineering. The instrument is capable of depositing multilayer thin films combining metal, semiconductor, and insulator materials, in situ device fabrication and in situ characterization of a broad range of physical properties. It will enable the exploration of novel energy-related materials and devices, spin effects and materials in solid state devices, electronic materials and sensors, and optical materials. These materials and devices will contribute to applications ranging from solar cells and batteries, data storage to biological sensing. The hybrid sputtering/e-beam thin film deposition system will foster cross-disciplinary interactions, and realize previously undiscovered synergies in research. It is an important addition to UB's material research infrastructure and is a key priority for the newly planned Materials Science and Engineering Ph.D. program as it will help to attract new faculty members from various fields strategic to the University. The instrument will be house in the Integrated Nanostructured Systems Instrument Facility where it will be available to the broader UB research community and regional companies and institutions. A large number of post-doctoral scholars, and graduate and undergraduate students will gain hands-on experience in the operation and maintenance of what has become an essential tool in modern materials research. A new course will be developed concentrating on nanoscale materials and devices. The PIs will work closely with Buffalo State College and UB's Cora P. Maloney College to involve underrepresented groups in research using the instrument.