MRI: Acquisition of a hybrid sputtering/evaporation thin film deposition system

MRI：购买混合溅射/蒸发薄膜沉积系统

• 批准号: 1726380
• 负责人: Sara Callori
• 金额: $ 25.49万
• 依托单位: University Enterprises Corporation at CSUSB
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-09-01 至 2019-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1726380&HistoricalAwards=false
• 关键词: MRI; Acquisition; hybrid; sputtering; evaporation

Part 1: This award from the Major Research Instrumentation (MRI) program supports research and training at California State University San Bernardino (CSUSB) through the acquisition of a thin film sputter deposition system. The proposed deposition system allows the principal investigator to grow high-quality ferroic oxide thin films and multilayers. By controlling the film thickness and composition, specific material properties or combinations of properties can be fine-tuned. This system will be utilized alongside the existing capabilities of the NSF-CREST funded CSUSB Center for Advanced Functional Materials, which will allow for the creation and characterization of novel hybrid organic/oxide systems as well as broaden student research participation and training at a large Hispanic- and minority-serving institution. The development of thin films for research aims and applications has led to important discoveries that have advanced the understanding of the interesting science at play in these films as well as allowed an accelerated development of technological materials. Ferroic materials, including ferroelectric and magnetic and multiferroics, have "led the charge" in many areas of research and development and will continue to do so in the future. As the need to understand and engineer ferroic thin film systems that can operate faster, more efficiently, or display novel functional properties grows, acquiring high-quality thin films will play a vital role in research programs centered around functional material studies. Part 2: This award supports the acquisition of a thin film sputter deposition system for scientific research and research training at California State University San Bernardino (CSUSB). This system will be used to deposit thin films and multilayered samples as a part of several research both within CSUSB and with domestic and international collaborators. It will combine off-axis rf-magneton sputtering and existing thermal evaporation capabilities in order to engineer a wide variety of single crystal and polycrystalline samples. The use of two techniques will allow research on novel systems combining often dissimilar materials, such as oxide and organic ferroelectrics, as well as allow for in-situ deposition of bottom electrodes, which can help avoid problems of interfacial contamination or electrically dead layers. This instrument supports research efforts by current faculty members, visiting graduate students, and undergraduate researchers and will enhance CSUSB's NSF-CREST funded Center for Advanced Functional Materials (CAFM). Current research focus includes: 1) Engineering novel ferroelectric and magnetic properties into single crystal oxide thin films using a variety of control parameters accessible though film growth including epitaxial strain and multilayer growth 2) Developing organic ferroelectric thin films 3) The study of functional hybrid organic/oxide systems. This award will increase the research infrastructure at CSUSB, particularly by furthering access to equipment for the deposition of a wide variety of thin films. CSUSB is an undergraduate-focused university and a qualifying Hispanic- and Minority-Serving institution, allowing the acquisition of this instrument to broaden participation of students from these demographics in state-of-the-art research. Community college partnerships will broaden the local reach of the instrumentation and further develop the STEM pipeline in the local area. Through the CREST program, the feasibility of a Materials Science Masters program is being investigated and a hybrid deposition system would serve as a major facility for research projects and training associated with such a program. Additionally, the ability to provide high-quality thin film samples will support the development of strong domestic and international collaborations focusing on the characterization of new thin film based systems.

第一部分：该奖项来自主要研究仪器（MRI）计划，通过收购薄膜溅射沉积系统，支持加州州立大学圣贝纳迪诺（CSUSB）的研究和培训。建议的沉积系统允许主要研究者生长高质量的氧化铁薄膜和多层膜。通过控制薄膜厚度和成分，可以微调特定的材料特性或特性组合。该系统将与NSF-CREST资助的CSUSB先进功能材料中心的现有能力一起使用，这将允许创建和表征新型混合有机/氧化物系统，并扩大学生的研究参与和培训在一个大型西班牙裔和少数民族服务机构。用于研究目的和应用的薄膜的发展导致了重要的发现，这些发现促进了对这些薄膜中有趣科学的理解，并允许加速技术材料的发展。铁材料，包括铁电体、磁性和多铁性材料，在许多研究和开发领域都处于“领先地位”，今后还将继续如此。 随着理解和设计能够更快、更有效地运行或显示新功能特性的铁性薄膜系统的需求不断增长，获得高质量的薄膜将在以功能材料研究为中心的研究计划中发挥至关重要的作用。第二部分：该奖项支持加州州立大学圣贝纳迪诺（CSUSB）收购用于科学研究和研究培训的薄膜溅射沉积系统。该系统将用于存款薄膜和多层样品作为CSUSB内部和国内外合作者的几项研究的一部分。它将结合联合收割机离轴射频磁控溅射和现有的热蒸发能力，以工程各种单晶和多晶样品。这两种技术的使用将允许研究结合通常不同材料的新系统，例如氧化物和有机铁电体，以及允许原位沉积底部电极，这可以帮助避免界面污染或电死层的问题。该仪器支持当前教师，访问研究生和本科生研究人员的研究工作，并将增强CSUSB的NSF-CREST资助的先进功能材料中心（CAFM）。目前的研究重点包括：1）通过薄膜生长（包括外延应变和多层膜生长）可获得的各种控制参数将新颖的铁电和磁性工程化到单晶氧化物薄膜中2）开发有机铁电薄膜3）功能混合有机/氧化物系统的研究。该奖项将增加CSUSB的研究基础设施，特别是通过进一步获得各种薄膜沉积设备。CSUSB是一所以本科生为重点的大学，也是一所合格的西班牙裔和少数民族服务机构，允许收购这一工具，以扩大这些人口统计数据中的学生参与最先进的研究。社区学院的合作伙伴关系将扩大仪器的本地覆盖范围，并进一步发展当地的STEM管道。通过CREST计划，材料科学硕士课程的可行性正在调查中，混合沉积系统将作为与该计划相关的研究项目和培训的主要设施。此外，提供高质量薄膜样品的能力将支持强大的国内和国际合作的发展，重点是表征新的薄膜系统。