MRI: Acquisition of Hybrid and Versatile Magnetron Sputtering/E-beam/Evaporation Thin Film Deposition System for Research and Education

这次MRI收购的目的是加强现有的研究计划，促进和促进新的多学科研究，并丰富了教育课程在密歇根大学-迪尔伯恩（UMD）。所需的混合多功能磁控溅射/电子束/蒸发薄膜沉积镀膜仪是下一代薄膜沉积系统，具有多功能溅射、电子束、热蒸发和有机蒸发的独特功能，这是同一高真空室下最新、最高质量的薄膜沉积平台。拟议中的所需仪器的收购将有很大的潜力，使更多的学生到工程和科学领域，解决密歇根州东南部地区的新兴技术需求。此次收购将显著提高研究质量，数量和知名度，不仅在UM-D校园，而且在密歇根州东南部地区的附近机构，并将为提高跨学科合作水平奠定基础。所要求的仪器以其独特的性能也将使各种各样的跨学科的研究计划在密歇根州东南部地区，包括通用汽车（GM）全球研发研究中心，奥克兰大学，劳伦斯技术大学和亨利福特社区学院，以及教育和推广工作的K-12学生。总的来说，主要研究人员预计所要求的仪器将影响来自27个研究小组的126多个用户。所要求的混合和多功能磁控溅射/电子束/蒸发薄膜沉积镀膜仪器将为UMD校园的所有工程和科学部门提供重要的基本框架，以加强他们的研究工作，并对相关的研究和教育培训产生积极的影响。凭借其独特的混合和多功能磁控溅射，电子束和蒸发能力，多层高质量和超薄薄膜可以沉积结合介电，金属，半导体，有机和磁性材料与上级界面性能。可以实现广泛的材料特性的原位表征。所要求的仪器将能够探索各种跨学科的研究活动：利用集成光电器件的先进智能和节能车辆系统;用于下一代光伏电池和固态照明器件的高质量和超薄功能薄膜;电池;数据存储;用于生物医学工程的生物MEMS和微流体;以及用于医疗保健的纳米颗粒。

The objective of this MRI acquisition is to enhance existing research programs, facilitate and promote new multidisciplinary research, and enrich the educational curriculum at University of Michigan-Dearborn (UMD). The requested hybrid and versatile magnetron sputtering/e-beam/evaporation thin film deposition&coating instrument is the next generation thin film deposition system, with unique capabilities of versatile sputtering, electron beam, thermal and organic evaporation, this is the latest and highest quality thin film deposition platform under the same high vacuum chamber. The proposed acquisition of the requested instrument will have great potential to bring more students to engineering and science areas addressing emerging technology demands in the Southeastern Michigan region. This acquisition will significantly enhance the research quality, quantity and visibility, not only at UM-D campus, but also at nearby institutions in the Southeastern Michigan area, and will set the stage for increased levels of interdisciplinary collaborations. The requested instrument with its unique properties will also enable a wide variety of cross disciplinary research initiatives in the Southeastern Michigan region, including General Motors (GM) Global R&D research center, Oakland University, Lawrence Technology University and Henry Ford Community College, as well as education and outreach efforts for K-12 students. Overall, the Principal Investigators expect the requested instrument will impact more than 126 users from 27 research groups.The requested hybrid and versatile magnetron sputtering/e-beam/evaporation thin film deposition&coating instrument will critically provide the fundamental framework for UMD campus in all engineering and science departments to enhance their research efforts and to have a positive impact on associated research and education training. With its unique hybrid and versatile magnetron sputtering, e-beam and evaporation capabilities, multilayer high quality and ultra-thin films can be deposited combining dielectric, metal, semiconductor, organic and magnetic materials with superior interface properties. In situ characterization of a broad range of material properties can be achieved. The requested instrument will enable the exploration of a variety of cross-disciplinary research activities: advanced intelligent and energy efficient vehicle system utilizing integrated optoelectronic devices; high quality and ultra thin functional thin films for next generation photovoltaic cells and solid state lighting devices; batteries; data storage; bioMEMS and microfludics for biomedical engineering; and nanoparticles for health care.