MRI: Acquisition of Hybrid and Versatile Magnetron Sputtering/E-beam/Evaporation Thin Film Deposition System for Research and Education

MRI：采购用于研究和教育的混合多功能磁控溅射/电子束/蒸发薄膜沉积系统

• 批准号: 1428069
• 负责人: Alex Yi
• 金额: $ 30.3万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2014
• 资助国家: 美国
• 起止时间: 2014-09-01 至 2022-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1428069&HistoricalAwards=false
• 关键词: MRI; Acquisition; Hybrid; Versatile; Magnetron

The objective of this MRI acquisition is to enhance existing research programs, facilitate and promote new multidisciplinary research, and enrich the educational curriculum at University of Michigan-Dearborn (UMD). The requested hybrid and versatile magnetron sputtering/e-beam/evaporation thin film deposition&coating instrument is the next generation thin film deposition system, with unique capabilities of versatile sputtering, electron beam, thermal and organic evaporation, this is the latest and highest quality thin film deposition platform under the same high vacuum chamber. The proposed acquisition of the requested instrument will have great potential to bring more students to engineering and science areas addressing emerging technology demands in the Southeastern Michigan region. This acquisition will significantly enhance the research quality, quantity and visibility, not only at UM-D campus, but also at nearby institutions in the Southeastern Michigan area, and will set the stage for increased levels of interdisciplinary collaborations. The requested instrument with its unique properties will also enable a wide variety of cross disciplinary research initiatives in the Southeastern Michigan region, including General Motors (GM) Global R&D research center, Oakland University, Lawrence Technology University and Henry Ford Community College, as well as education and outreach efforts for K-12 students. Overall, the Principal Investigators expect the requested instrument will impact more than 126 users from 27 research groups.The requested hybrid and versatile magnetron sputtering/e-beam/evaporation thin film deposition&coating instrument will critically provide the fundamental framework for UMD campus in all engineering and science departments to enhance their research efforts and to have a positive impact on associated research and education training. With its unique hybrid and versatile magnetron sputtering, e-beam and evaporation capabilities, multilayer high quality and ultra-thin films can be deposited combining dielectric, metal, semiconductor, organic and magnetic materials with superior interface properties. In situ characterization of a broad range of material properties can be achieved. The requested instrument will enable the exploration of a variety of cross-disciplinary research activities: advanced intelligent and energy efficient vehicle system utilizing integrated optoelectronic devices; high quality and ultra thin functional thin films for next generation photovoltaic cells and solid state lighting devices; batteries; data storage; bioMEMS and microfludics for biomedical engineering; and nanoparticles for health care.

此次收购MRI的目的是加强现有的研究项目，促进和促进新的多学科研究，并丰富密歇根大学迪尔伯恩分校(UMD)的教育课程。所要求的混合多功能磁控溅射/电子束/蒸发薄膜沉积及镀膜仪是下一代薄膜沉积系统，具有多功能溅射、电子束、热和有机蒸发的独特能力，这是在相同的高真空室下最新和最高质量的薄膜沉积平台。对所要求的仪器的拟议收购将具有巨大的潜力，将把更多的学生吸引到工程和科学领域，以满足密歇根东南部地区的新兴技术需求。此次收购将显著提高研究的质量、数量和知名度，不仅在密歇根大学D分校，而且在密歇根东南部地区的附近机构也是如此，并将为提高跨学科合作水平奠定基础。所要求的仪器凭借其独特的性能，还将使密歇根东南部地区的各种跨学科研究计划成为可能，包括通用汽车(GM)全球研发研究中心、奥克兰大学、劳伦斯科技大学和亨利·福特社区学院，以及针对K-12学生的教育和推广工作。总体而言，首席调查人员预计，所要求的仪器将影响来自27个研究小组的126多名用户。所要求的混合和多功能磁控溅射/电子束/蒸发薄膜沉积和镀膜仪器将为所有工程和科学部门的大学校园提供基本框架，以加强他们的研究努力，并对相关的研究和教育培训产生积极影响。凭借其独特的混合和多功能磁控溅射、电子束和蒸发能力，可以沉积结合具有优异界面性能的介电、金属、半导体、有机和磁性材料的多层高质量超薄膜。可以实现对广泛材料性质的原位表征。所要求的仪器将使探索各种跨学科研究活动成为可能：利用集成光电子器件的先进智能和节能车辆系统；用于下一代光伏电池和固态照明设备的高质量和超薄功能薄膜；电池；数据存储；用于生物医学工程的生物MEMS和微流控；以及用于医疗保健的纳米颗粒。