CAREER: GC Matrix, a Microsystem Approach for Complex Gas Analysis

该CAREER提案的目标是在一个名为“GC Matrix”的信用卡大小的平台上开发一种新的气相色谱架构，旨在仅在几秒钟内高效分离和检测复杂的挥发性混合物（100种化合物）。办法是：1）开发可预测的单蚀刻步骤三维掩埋通道技术，2）开发具有芯片上加热器、温度传感器、流量计和热导气体检测器（TCD）的GC柱，以及3）将柱集成到具有最小死体积和流体传输线的矩阵架构中，并证明GC矩阵分离效率。它将在矩阵的所有行中被同时分析;然而，基于分析物的挥发性范围，每行被配置为仅分离混合物的子集。每行中的串联耦合的MEMS柱将具有不同的固定相，并且可以独立地进行温度编程，从而提供高度的灵活性以基于化合物的沸点和极性快速分离每个子集内的化合物。将通过分析从其片上TCD截取的每个微柱的分离结果进行分析物鉴别。通过让行业参与课程活动，创建“微系统实验室”课程，并通过与VT的全国黑人工程师协会和IEEE的教师服务计划合作建立高中微系统工程计划（HMEP），该提案将帮助学生发现电气工程的社会效益，这是他们招聘和保留工程的重要因素。

The objective of this CAREER proposal is to develop a new gas chromatographic architecture on a credit-card-size platform, named "GC Matrix," aimed at highly efficient separation and detection of complex volatile mixtures (100 compounds) in only a few seconds. The approach is to: 1) develop a predictable single-etch-step three-dimensional buried channel technique, 2) develop GC columns having on-chip heaters, temperature sensors, flow meters, and thermal conductivity gas detectors (TCD), and 3) integrate the columns into a matrix architecture with minimal dead volume and fluidic transfer lines and demonstrate the GC Matrix separation efficiency.In the proposed GC matrix, once the sample is injected, it will be simultaneously analyzed in all rows of the matrix; however, each row is configured, based on the volatility range of the analytes, to separate only a subset of the mixture. The serially coupled MEMS columns in each row will have different stationary phases and can be temperature programmed independently, providing a high degree of flexibility to rapidly separate compounds within each subset based on their boiling points and polarities. Analyte identification will be performed by analyzing the separation results of each column intercepted from its on-chip TCD. By involving industry in curriculum activities, creating a "Microsystems Laboratory" course, and establishing the High-School Microsystems Engineering Program (HMEP) through collaboration with VT's National Society of Black Engineers and IEEE's Teacher in Service Program, this proposal will help students discover the societal benefits of electrical engineering which is an important factor in their recruitment and retention in engineering.