MEMS-Based Multicapillary Columns with Nano-Structured Stationary Phases for High-Speed, High-Performance Gas Chromatography

基于 MEMS 的多毛细管柱，具有纳米结构固定相，适用于高速、高性能气相色谱分析

• 批准号: 0601456
• 负责人: Masoud Agah
• 金额: --
• 依托单位: Virginia Polytechnic Institute and State University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-05-15 至 2010-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0601456&HistoricalAwards=false
• 关键词: MEMS; Based; Multicapillary; Columns; Nano

0601456MasoudThe objective of this research is to fabricate MEMS-based multicapillary separation columns with nano-structured stationary phases for high-speed, high-performance gas chromatography. The approach is to: 1) fabricate low-mass (low-power) multicapillary columns having integrated heaters and temperature sensors for temperature programming using high-aspect-ratio silicon etching techniques and a silicon-on-glass dissolved wafer process, 2) deposit ionic self-assembled multilayers (ISAM) on the column walls as stationary phases with nanometer thicknesses, and 3) evaluate the column separation performance in terms of injection and detection issues, analyte resolution/reproducibility/peak shape, and speed of repeated analysis. Separations of both normal and branched alkanes from C5-C16 and polyaromatic hydrocarbons of variable ring-size in less than 5 s are expected. Intellectual Merit: The ability to self-assemble both polar and non-polar stationary phase materials will lead to the separation of gas mixtures in a wide range of applications namely environmental monitoring, homeland security, and pharmaceutical analysis with a high degree of resolution and accuracy. Broader Impact: The outcome of this project will provide an outstanding example of how MEMS and Nanotechnology can become highly complementary methodologies to develop low-cost, low-power, high-performance devices that impact industries across the globe considering that the worldwide market for GC instruments is estimated to be around $1 billion annually. This research will also advance discovery while promoting teaching and learning through Virginia Tech's outreach programs, research opportunities for undergraduates, recruiting of graduate students from under-represented groups into a highly interdisciplinary research program, and incorporation of the project results in courses taught by the PIs in three different departments.

0601456 Masoud本研究的目的是制造基于MEMS的多毛细管分离柱与纳米结构的固定相的高速，高效的气相色谱。办法是：1）制造低质量（低功率）多毛细管柱，其具有集成的加热器和温度传感器，用于使用高纵横比硅蚀刻技术和玻璃上硅溶解晶片工艺进行温度编程，2）在柱壁上存款离子自组装多层（ISAM）作为具有纳米厚度的固定相，和3）在注射和检测问题方面评估柱分离性能，分析物分辨率/再现性/峰形和重复分析的速度。预期在小于5秒内从C5-C16和可变环尺寸的多环芳烃中分离正链和支链烷烃。智力优势：自组装极性和非极性固定相材料的能力将导致在广泛的应用中分离气体混合物，即环境监测，国土安全和药物分析，具有高度的分辨率和准确度。更广泛的影响：该项目的成果将提供一个杰出的例子，说明MEMS和纳米技术如何成为高度互补的方法，以开发影响地球仪行业的低成本、低功耗、高性能设备，因为全球GC仪器市场估计每年约为10亿美元。这项研究还将推进发现，同时通过弗吉尼亚理工大学的推广计划，为本科生提供研究机会，从代表性不足的群体中招募研究生进入高度跨学科的研究计划，并将项目结果纳入由PI教授的课程中。