Collaborative Research: Mathematical Modeling and Experimental Study of Femtosecond Laser Machining of High Aspect Ratio Microstructures

合作研究：飞秒激光加工高深宽比微结构的数学建模和实验研究

• 批准号: 0826015
• 负责人: Shuting Lei
• 金额: --
• 依托单位: Kansas State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0826015&HistoricalAwards=false
• 关键词: Collaborative; Research; Mathematical; Modeling; Experimental

The research objective of this collaborative project is to develop and verify a physics-based model to reveal and quantitatively understand the fundamental physical processes of femtosecond laser-matter interactions in high aspect ratio microstructures. The study employs a combination of experimental and mathematical modeling approaches. Femtosecond laser-matter interactions in high aspect ratio microstructures will be experimentally observed using the pump-probe imaging, optical emission spectroscopy, and other techniques. Important process parameters, such as laser ablation rate, laser- induced plasma (due to the target vaporization and/or hydrodynamic expansion) and shock wave propagation speed, plasma temperature and electron number density, will be measured. The numerical model is based on the solution of Maxwell?s wave equation and hydrodynamic equations, and will be improved and verified by comparing simulations with measurements.If successfully completed, the benefits of this project will be to set up a solid science base for femtosecond laser-matter interactions in high aspect ratio microstructures. This will establish femtosecond laser micromachining as a direct, flexible, and single-step technology that can realize a precise and controlled production of high-aspect ratio microstructures, which will have a big impact on microelectromechanical system, automotive, aerospace, and optics industries, where the demand for high aspect ratio microstructures has been increasing. The research results will be published in related journals and presented at technical conferences. Direct interactions with companies will be performed for research result dissemination. This interdisciplinary project provides a good opportunity for the training of graduate students. Undergraduate students and students from underrepresented groups will also be involved in the project. Animation demonstration kits based on the project results will be sent to the high schools in the neighborhood of Illinois Institute of Technology, which have high minority enrollment. This will promote the interest of high school students in science and engineering.

该协作项目的研究目标是开发和验证一个基于物理的模型，以揭示和定量了解高纵横比微结构中飞秒激光互动的基本物理过程。该研究采用了实验和数学建模方法的组合。 使用泵 - 探针成像，光学发射光谱和其他技术，将在高纵横比微结构中进行高纵横比微结构的激光 - 物质相互作用。 将测量重要的过程参数，例如激光消融速率，激光诱导的血浆（由于目标蒸发和/或流体动力膨胀）以及冲击波传播速度，血浆温度和电子数密度。数值模型基于麦克斯韦的波动方程和流体动力方程的解决方案，并将通过将模拟与测量进行比较来改进和验证。如果成功完成，该项目的好处将是为高高的长远比结构中的flestosecond Laser-Mytertions建立固体科学基础。这将建立飞秒激光微加工作为一种直接，灵活和单步的技术，可以实现高空高度比率微观结构的精确和受控的生产，这将对微电学系统，汽车，航空航天和光学行业产生重大影响，在该工业中对高纵横比比比率的需求增加了。研究结果将在相关期刊上发表，并在技术会议上发表。将与公司进行直接互动以进行研究结果传播。 这个跨学科项目为研究生培训提供了一个很好的机会。该项目也将参与该项目的本科生和来自代表性不足小组的学生。 基于项目结果的动画演示套件将发送给伊利诺伊理工学院附近的高中，该研究所的少数派入学率很高。 这将促进高中学生对科学和工程学的兴趣。