Collaborative Research: Mathematical Modeling and Experimental Study of Femtosecond Laser Machining of High Aspect Ratio Microstructures

合作研究：飞秒激光加工高深宽比微结构的数学建模和实验研究

• 批准号: 0826015
• 负责人: Shuting Lei
• 金额: --
• 依托单位: Kansas State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0826015&HistoricalAwards=false
• 关键词: Collaborative; Research; Mathematical; Modeling; Experimental

The research objective of this collaborative project is to develop and verify a physics-based model to reveal and quantitatively understand the fundamental physical processes of femtosecond laser-matter interactions in high aspect ratio microstructures. The study employs a combination of experimental and mathematical modeling approaches. Femtosecond laser-matter interactions in high aspect ratio microstructures will be experimentally observed using the pump-probe imaging, optical emission spectroscopy, and other techniques. Important process parameters, such as laser ablation rate, laser- induced plasma (due to the target vaporization and/or hydrodynamic expansion) and shock wave propagation speed, plasma temperature and electron number density, will be measured. The numerical model is based on the solution of Maxwell?s wave equation and hydrodynamic equations, and will be improved and verified by comparing simulations with measurements.If successfully completed, the benefits of this project will be to set up a solid science base for femtosecond laser-matter interactions in high aspect ratio microstructures. This will establish femtosecond laser micromachining as a direct, flexible, and single-step technology that can realize a precise and controlled production of high-aspect ratio microstructures, which will have a big impact on microelectromechanical system, automotive, aerospace, and optics industries, where the demand for high aspect ratio microstructures has been increasing. The research results will be published in related journals and presented at technical conferences. Direct interactions with companies will be performed for research result dissemination. This interdisciplinary project provides a good opportunity for the training of graduate students. Undergraduate students and students from underrepresented groups will also be involved in the project. Animation demonstration kits based on the project results will be sent to the high schools in the neighborhood of Illinois Institute of Technology, which have high minority enrollment. This will promote the interest of high school students in science and engineering.

该合作项目的研究目标是开发和验证一个基于物理的模型，以揭示和定量理解高纵横比微结构中飞秒激光与物质相互作用的基本物理过程。本研究采用实验与数学建模相结合的方法。高纵横比微结构中的飞秒激光-物质相互作用将使用泵浦探针成像、光学发射光谱和其他技术进行实验观察。重要的工艺参数，如激光烧蚀率，激光诱导等离子体（由于目标汽化和/或流体动力膨胀）和激波传播速度，等离子体温度和电子数密度，将被测量。数值模型是基于麦克斯韦？S波方程和水动力方程，并将通过模拟与实测的比较来改进和验证。如果成功完成，该项目将为高纵横比微结构中的飞秒激光-物质相互作用建立坚实的科学基础。这将使飞秒激光微加工成为一种直接、灵活、单步的技术，可以实现高纵横比微结构的精确和可控生产，这将对微机电系统、汽车、航空航天和光学行业产生重大影响，这些行业对高纵横比微结构的需求不断增加。研究成果将在相关期刊上发表，并在技术会议上发表。与企业直接互动，传播研究成果。这个跨学科的项目为研究生的培养提供了一个很好的机会。本科生和来自代表性不足群体的学生也将参与该项目。基于项目成果的动画演示工具包将被发送到伊利诺伊州理工学院附近的高中，这些高中的少数民族入学率很高。这将促进高中生对科学和工程的兴趣。