Project-Based Modeling & Simulation and Experimental Modules for MEMS Undergraduate Education

工程机械-(56)目前，全国许多大学都开设了微电子机械系统(MEMS)课程。由于本课程包含四个传统的工程主题(即固体力学、动力学系统、换能机构和电路)，需要同时耦合来描述MEMS器件的行为；因此，教授这门理论课程具有极大的挑战性。此外，学生对所教概念的理解和理解以及对这一领域的兴趣和参与程度一直受到限制。该项目通过为MEMS本科课程创建新的学习材料和教学策略来解决这些问题。开发的学习材料包括基于项目的建模和仿真活动以及各种MEMS设备的实验模块。学生们以小组形式设计MEMS器件，从开发的概念阶段开始，一直到制造和测试性能参数。本项目采用的教学策略包括：1)讨论式会议，更多地关注个别学生和团队建设；2)广泛演示使用软件进行分析和进行实验。该项目使学生具备独立分析和综合概念理论并将其适当应用于各种MEMS项目所需的技能。

Engineering Mechanical - (56)Currently, MicroElectroMechanical Systems (MEMS) courses are offered in many universities nationwide. Because this course encompasses four traditional engineering themes (i.e. solid mechanics, dynamic systems, transduction mechanisms, and electrical circuits) that need to be simultaneously coupled to describe the behavior of MEMS devices; teaching this theory course has been extremely challenging. Additionally, student understanding and comprehension of concepts taught as well as level of interest and engagement in this area has been limited. This project addresses these concerns by creating new learning materials and teaching strategies for MEMS undergraduate courses. The learning materials developed include project-based modeling and simulation activities as well as experimental modules on various MEMS devices. Students work in teams to design MEMS devices starting from the conceptual phase of development through manufacturing and testing of performance parameters. Teaching strategies employed in this project include: 1) discussion-style meetings with more attention toward individual students and team-building; and 2) extensive demonstrations of using software for analysis and conducting experiments. This project equips students with the skills needed to independently analyze and synthesize conceptual theories and apply them appropriately to various MEMS projects.