Robust Design of High Performance MEMS Resonators

该奖项的研究目标是开发一种数学框架，以支持高性能、坚固耐用的MEMS(微型机电系统)谐振器的设计。研究的主要重点是开发具有高品质因数(Q因子，MEMS谐振器性能最关键的设计参数)的谐振器结构设计方法，并减少制造不确定性对性能变化的影响。研究方法是基于Q因子的数值模型和收集的MEMS谐振器样品的测试数据来构建随机设计优化。所得到的设计框架的有效性将通过MEMS陀螺仪进行验证。通过建立一个结合Q因子数值模型、设计优化和测试数据的设计框架，本研究将获得高Q因子和设计稳健性的MEMS谐振器的设计方案，而不需要反复试验，如果成功，本研究结果将为高性能MEMS谐振器的设计提供框架。这些谐振器具有广泛的民用和军用用途，包括集成的传感和无线通信微系统、传感设备、无人驾驶飞行器(UAV)和消费/军用电子产品。生产对制造不确定性具有较强耐用性的MEMS谐振器，有可能提高美国的安全性，并提高美国在微系统设计方面保持竞争力的能力。在这项研究的基础上，将开展一项K-12外联计划，其中包括研究项目、为当地高中生设立夏令营教育单元，以及为当地小学生进行实地考察。通过与诺福克州立大学的合作，来自代表性不足群体的本科生和研究生都将被纳入这项研究。诺福克州立大学是HBCU的一所机构，与老多米尼恩大学(ODU)位于同一城市。

The research objective of this award is to develop a mathematical framework that will support the design of high performance, robust MEMS (MicroElectroMechanical Systems) resonators. The primary focus of the research is on developing methods to design resonator structures with high Quality factors (Q-factors, the most critical design parameter for the performance of MEMS resonators), and reduce the effect of fabrication uncertainties on performance variations. The research approach is to construct stochastic design optimization upon the numerical models of Q-factors and collected test data on MEMS resonator samples. The validity of the resulting design framework will be demonstrated using MEMS gyroscopes. By building a design framework that combines numerical models of Q-factors, design optimization, and testing data, this research will result in methods to achieve design solutions to MEMS resonators with high Q-factors and design robustness, without the need for trial-and-error cycles.If successful, the results of this research will provide a framework for designing high performance MEMS resonators. These resonators have widespread civilian and military uses including integrated sensory and wireless communication microsystems, sensing devices, Unmanned Aerial Vehicles (UAVs), and consumer/military electronics. Producing MEMS resonators which are robust to fabrication uncertainties has the potential to improve US security and the ability of the US to remain competitive in microsystem design. Based on this research, a K-12 outreach plan will be carried out which includes research projects, an education module for summer camps for local high school students, and field-trips for local elementary school students. Both undergraduate and graduate students from underrepresented groups will be brought into the research, through collaborations with Norfolk State University, an HBCU institution in the same city as Old Dominion University (ODU).