Robust Design of High Performance MEMS Resonators

高性能 MEMS 谐振器的稳健设计

• 批准号: 0826420
• 负责人: Julie Zhili Hao
• 金额: $ 34.38万
• 依托单位: Old Dominion University Research Foundation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-09-15 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0826420&HistoricalAwards=false
• 关键词: Robust; Design; Performance; MEMS; Resonators

The research objective of this award is to develop a mathematical framework that will support the design of high performance, robust MEMS (MicroElectroMechanical Systems) resonators. The primary focus of the research is on developing methods to design resonator structures with high Quality factors (Q-factors, the most critical design parameter for the performance of MEMS resonators), and reduce the effect of fabrication uncertainties on performance variations. The research approach is to construct stochastic design optimization upon the numerical models of Q-factors and collected test data on MEMS resonator samples. The validity of the resulting design framework will be demonstrated using MEMS gyroscopes. By building a design framework that combines numerical models of Q-factors, design optimization, and testing data, this research will result in methods to achieve design solutions to MEMS resonators with high Q-factors and design robustness, without the need for trial-and-error cycles.If successful, the results of this research will provide a framework for designing high performance MEMS resonators. These resonators have widespread civilian and military uses including integrated sensory and wireless communication microsystems, sensing devices, Unmanned Aerial Vehicles (UAVs), and consumer/military electronics. Producing MEMS resonators which are robust to fabrication uncertainties has the potential to improve US security and the ability of the US to remain competitive in microsystem design. Based on this research, a K-12 outreach plan will be carried out which includes research projects, an education module for summer camps for local high school students, and field-trips for local elementary school students. Both undergraduate and graduate students from underrepresented groups will be brought into the research, through collaborations with Norfolk State University, an HBCU institution in the same city as Old Dominion University (ODU).

该奖项的研究目标是开发一个数学框架，以支持高性能，鲁棒的MEMS（微机电系统）谐振器的设计。研究的主要重点是开发设计具有高品质因数（Q因子，MEMS谐振器性能的最关键设计参数）的谐振器结构的方法，并减少制造不确定性对性能变化的影响。研究方法是在MEMS谐振器样品的Q因子的数值模型和收集的测试数据的基础上构建随机设计优化。所得到的设计框架的有效性将证明使用MEMS陀螺仪。通过建立一个结合Q值数值模型、设计优化和测试数据的设计框架，本研究将导致实现具有高Q值和设计鲁棒性的MEMS谐振器的设计解决方案的方法，而不需要反复试验，如果成功的话，本研究的结果将为设计高性能MEMS谐振器提供一个框架。这些谐振器具有广泛的民用和军用用途，包括集成传感和无线通信微系统、传感设备、无人机（UAV）和消费/军用电子产品。生产对制造不确定性具有鲁棒性的MEMS谐振器有可能提高美国的安全性和美国在微系统设计中保持竞争力的能力。在这项研究的基础上，将实施一项K-12外联计划，其中包括研究项目、当地高中生夏令营教育模块和当地小学生实地考察。来自代表性不足群体的本科生和研究生都将通过与诺福克州立大学的合作参与研究，这是一所与旧自治领大学（ODU）位于同一城市的HBCU机构。