SBIR Phase I: Fast-Response, High Sensitivity MEMS based NOx Emission Sensor

SBIR 第一阶段：基于 MEMS 的快速响应、高灵敏度氮氧化物排放传感器

• 批准号: 0839191
• 负责人: Richard Mlcak
• 金额: --
• 依托单位: BOSTON MICROSYSTEMS INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0839191&HistoricalAwards=false
• 关键词: SBIR; Phase; Fast; Response; Sensitivity

This Small Business Innovation Research (SBIR) Phase I project demonstrates the technical feasibility of a Fast-Response, High Sensitivity MEMS based NOx Emission Sensor for Diesel and Other Lean Burn Engines. The innovation combines the company?s SiC-based MEMS piezoelectric bimorph microresonator chemical detection technology with a NOx sensor materials technology patented by MIT, to develop a NOx sensor needed for emissions control and capable of operation in harsh engine emissions environments. This will be accomplished by 1) formulating NOx-sensitive material compositions optimized for sensitivity, reversibility and long term stability, 2) developing deposition processes for integrating the NOx sensitive materials onto its MEMS resonators, and 3) developing high temperature compatible electrodes and packaging compatible with hot engine emissions. If successful the proposed NOx sensor will fill a strategic and unmet need allowing diesel engines to conform to new diesel engine emissions standards being implemented by the U.S. Environmental Protection Agency (EPA), European Union and Japan. The proposed program will develop and demonstrate highly innovative, sensitive and stable MEMS-based resonator sensor suitable for detecting NOx and ultimately other pollutants in high temperature and chemically aggressive engine emissions environments, and will position US industry for a leadership role in engine emissions NOx control. In order to meet these standards, automobile and truck manufacturers have turned to two after-treatment technologies that reduce tailpipe NOx emission levels. Both after-treatment technologies require NOx sensors, to 1) control the after treatment trap-regenerate cycle, and 2) to monitor after-treatment system performance, confirming proper NOx restriction or triggering the ?check engine? indicator. The NOx sensor will allow clean, energy efficient diesel engines to continue to replace gasoline engines, thereby reducing fuel consumption and carbon emissions without increasing NOx pollutants. Furthermore, as the NOx sensor and NOx remediation technologies are introduced into diesel automobiles, trucks, locomotives, diesel power generators etc., these systems will become cleaner providing significant value to society in the form of cleaner air, improved health and reduced medical costs.

这项小型企业创新研究（SBIR）I阶段项目展示了柴油和其他瘦燃烧发动机的快速响应，高灵敏度MEMS发射传感器的技术可行性。这项创新将公司基于MEMS的MEMS压电双层微孔板化学检测技术与MIT专利的NOX传感器材料技术相结合，以开发用于排放控制所需的NOX传感器，并能够在恶劣的发动机排放环境中运行。这将通过1）通过为NOX敏感的材料组成来完成，以优化了针对灵敏度，可逆性和长期稳定性，2）开发沉积过程，将NOX敏感材料集成到其MEMS谐振器上，以及3）开发高温兼容的电极和与热发动机兼容的包装。如果成功的话，提出的NOX传感器将满足战略和未满足的需求，允许柴油发动机符合美国环境保护署（EPA），欧盟和日本实施的新柴油发动机排放标准。拟议的程序将开发并展示高度创新，敏感和稳定的基于MEMS的谐振传感器，适用于在高温和化学上具有攻击性发动机排放环境中检测NOX和其他污染物，并将在发动机发动机NOX控制中发挥领导作用。为了符合这些标准，汽车和卡车制造商已转向两种降低尾管NOX排放水平的后处理技术。两种后处理技术都需要NOX传感器，至1）控制治疗后的陷阱再生周期，2）以监视处理后系统的性能，确认适当的NOX限制或触发？检查引擎？指标。 NOX传感器将允许清洁，节能的柴油发动机继续替代汽油发动机，从而在不增加NOX污染物的情况下减少燃料消耗和碳排放。此外，随着NOX传感器和NOX补救技术被引入柴油汽车，卡车，机车，柴油发电机等中，这些系统将变得更加清洁，以更清洁的空气，改善健康和降低医疗费用为社会提供重要价值。