SBIR Phase II: Fast-Response, High Sensitivity MEMS based NOx Emission Sensor

该小型企业创新研究（SBIR）第二阶段项目将开发用于柴油发动机和其他稀燃燃烧系统的氮氧化物（NOx）传感器。这项创新将独特的SiC基压电双晶片微谐振器化学检测技术与NOx敏感材料相结合，开发出能够在恶劣发动机排放环境中工作的排放控制NOx传感器。 的NOx传感器的可行性证明在第一阶段通过组装一个初步的原型，测试它在环境中的特点，热发动机排放，并证明1 ppm的NOx检测与1秒的响应时间和稳定的操作在400？AC. 第二阶段的研究目标是改进传感器，包括双晶谐振器，NOx敏感涂层，包装和控制电子设备，以实现更高的温度操作，5年的寿命，并在不同浓度的其他废气中可靠地检测1 ppm的NOx。 将进行广泛的稳定性和寿命测试，以确定和解决潜在的降解机制，如中毒，结垢，积碳和材料相互扩散。该原型包括集成加热器、温度传感器、控制电子设备和电源/数据接口，将在发动机试验台上运行，以证明在实际排气环境中的性能。 该项目更广泛的影响/商业潜力在于它能够加速采用和使用使用清洁柴油和可再生柴油燃料的汽车，这是减少污染排放和美国对外国能源供应依赖的低风险和高影响的方式。 柴油发动机的温室气体排放量通常比可比的汽油动力车辆少20%。 然而，它们也会产生大量的氮氧化物（NOx），这是一种导致烟雾和酸雨的污染物。 虽然存在处理和消除这种NOx污染的技术，但它需要具有灵敏度和响应时间的高温兼容传感器，而这种传感器目前在商业上并不存在。 NSF SBIR第二阶段计划将开发一种NOx传感器，能够满足汽车行业对柴油发动机排放传感器的需求，用于实时车载诊断和减排，使车辆符合2013年生效的新环境法规。 更广泛地采用清洁柴油发动机将减少温室气体排放和对石油的依赖，因为消费者越来越多地选择这些更环保，更具成本效益的车辆。

This Small Business Innovation Research (SBIR) Phase II project will develop a nitrogen oxide (NOx) sensor for diesel engine and other lean-burn combustion systems. This innovation combines unique SiC-based piezoelectric bimorph microresonator chemical detection technology with NOx sensitive materials, to develop an emissions control NOx sensor capable of operating in harsh engine emissions environments. The feasibility of the NOx sensor was demonstrated in Phase I by assembling a preliminary prototype, testing it in environments characteristic of hot engine emissions, and demonstrating 1 ppm NOx detection with 1 second response times and stable operation at 400?aC. The Phase II research objectives are to refine the sensor, including the bimorph resonator, NOx sensitive coatings, packaging and control electronics, to achieve higher temperature operation, 5 year lifetime, and reliable detection of 1 ppm NOx in the presence of varying concentrations of other exhaust gases. Extensive stability and life testing will be performed to identify and address potential degradation mechanisms such as poisoning, fouling, carbon deposition and materials inter diffusion. The prototype, including integrated heater, temperature sensor, control electronics and power/ data interface, will be operated in engine test stands to demonstrate performance in actual exhaust environments. The broader impact/commercial potential of this project lies in its ability to accelerate the adoption and use of automobiles that use clean diesel and renewable diesel fuels, which is a low-risk and high-impact way of reducing both polluting emissions and US dependency on foreign energy supplies. Diesel engines typically produce up to 20% less greenhouse gas emissions than a comparable gasoline powered vehicle. However, they also produce a significantly higher amount of nitrogen oxides (NOx), a pollutant that causes smog and acid rain. Although the technology exists to treat and eliminate this NOx pollution, it requires a high temperature compatible sensor with sensitivity and response time that does not exist commercially today. This NSF SBIR Phase II program will develop a NOx sensor capable of meeting the needs of the automotive industry for a diesel engine emissions sensor for both real-time on-board diagnostics and emissions reduction, bringing vehicles into compliance with new environmental regulations coming into effect in 2013. Enabling the wider adoption of clean diesel engines will reduce both greenhouse gas emissions and dependency on petroleum, as consumers increasingly choose these greener and more cost-effective vehicles.