STTR Phase I: Micromachined Harsh Environment Quantum-Well Nitride Sensors

STTR 第一阶段：微机械恶劣环境量子阱氮化物传感器

• 批准号: 9903630
• 负责人: Richard Mlcak
• 金额: $ 10万
• 依托单位: BOSTON MICROSYSTEMS INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-07-01 至 2000-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9903630&HistoricalAwards=false
• 关键词: STTR; Phase; Micromachined; Harsh; Environment

This Small Business Technology Transfer (STTR) Phase I project combines a number of key innovations to develop a refractory, highly stable, and ultra-high sensitivity SiC-GaAlN MEMS sensor platform suitable for operating in harsh (high temperature, high pressure, corrosive, and high energy-radiation) environments. This harsh-environment sensor platform is enabled, for the first time, by the integration of three recent innovations: (1) bulk micromachining of single crystal SiC, (2) growth of nitride semiconductor Quantum Well Structures (QWS), and (3) the giant piezoresistance (GPR) effect. GaN-GaAlN QWS devices will be fabricated onto micromachined device-quality single crystal SiC substrates using patented SiC micromachining technologies. SiC is an ideal substrate for growth of nitride semiconductors, and both SiC and GaN-AIN compounds have high (3.0-6.2 eV) band gaps, high melting temperatures (1700-3000 degree C), and excellent mechanical and chemical properties making them eminently suitable for use in harsh environments. The versatility of the giant piezoresistance transduction, SIC-GaAIN sensor platform will first be demonstrated by fabrication of highly sensitive temperature and pressure sensors. Commercial applications will be in: (a) advanced aeropropulsion control systems; (b) automotive and utilities combustion control systems; and (c ) chemical processing facilities. The proposed harsh environment sensor platform has commercial applications for monitoring of pressure, temperature, flow, acceleration, and sound in advanced aeropropulsion control systems (e.g. turbine engines), automotive and utilities combustion control systems, and chemical processing facilities.

这个小型企业技术转移（STTR）I期项目结合了许多关键创新，以开发难治性，高度稳定和超高敏感性SIC-GAALN MEMS传感器平台，适合在苛刻的（高温，高压，腐蚀性和高能量放置）环境中运行。通过整合最近的三项创新，这是首次启用这种恶劣的环境传感器平台：（1）单晶SIC的批量微加工，（2）硝酸盐半导体量子井结构（QWS）的生长，以及（3）巨型Piezoresistance（GPR）效应。 Gan-Gaaln QWS设备将使用专利的SIC微加工技术来制造在微机械设备质量的单晶SIC底物上。 SIC是氮化半导体生长的理想底物，SIC和GAN-aIN化合物都具有较高（3.0-6.2 eV）带隙，高熔体温度（1700-3000级C），并且具有出色的机械和化学性能，使它们非常适合在恶劣的环境中使用。 SIC-GAAIN传感器平台的巨型压电转导的多功能性将首先通过制造高度敏感的温度和压力传感器来证明。 商业应用将在：（a）高级气管控制系统； （b）汽车和公用事业燃烧系统； （c）化学加工设施。 拟议的苛刻环境传感器平台具有商业应用，可用于监视高级驾驶控制系统（例如涡轮机发动机），汽车和公用事业燃烧系统以及化学处理设施中的压力，温度，流动，加速度和声音。