SBIR Phase II: Harsh Environment Fluid Viscosity-Density Sensor

SBIR 第二阶段：恶劣环境流体粘度-密度传感器

• 批准号: 0239151
• 负责人: Richard Mlcak
• 金额: $ 50万
• 依托单位: BOSTON MICROSYSTEMS INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-02-15 至 2007-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0239151&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Harsh; Environment

This Small Business Innovation Research Phase II project is aimed at developing MEMS-based miniaturized fluid viscosity and density sensors that can operate within small confines provide electronic readout, and that are capable of surviving harsh environments (high temperature, high pressure, corrosive, abrasive) typical of many fluid sensor applications. The Harsh Environment Fluid Viscosity-Density Sensor consists of a packaged flexural plate wave (FPW) resonator instrumented with low cost, compact electronics for sensor read-out. In Phase I, the technical objectives were successfully accomplished by fabricating resonant FPW fluid sensors from harsh environment compatible single crystal SiC and epitaxial piezoelectric AlN materials, and demonstrated their ability to independently measure fluid viscosity and density. In Phase II, fully functional, packaged and electronically instrumented Harsh Environment Fluid Viscosity-Density Sensor prototypes will be developed and optimized for specific customer applications. The fluid sensors will be field tested in our customer's systems to demonstrate precise and accurate fluid viscosity and density measurements and stable operation in the customer's fluids and environmental conditions. After successful completion of Phase II, the Harsh Environment Fluid Viscosity-Density Sensor will be ready for scale-up manufacturing and commercialization in Phase III.The Harsh Environment Fluid Viscosity-Density Sensor has commercial applications in 1) Condition-Based Maintenance of oils and other fluids in engines and industrial process equipment, 2) Process and Quality Control in manufacturing, chemical processing and water/waste treatment industries, and 3) down-hole sensors for Petrochemical Exploration and Extraction

该小型企业创新研究第二阶段项目旨在开发基于 MEMS 的微型流体粘度和密度传感器，这些传感器可以在小范围内运行，提供电子读数，并且能够承受许多流体传感器应用中典型的恶劣环境（高温、高压、腐蚀性、磨蚀性）。恶劣环境流体粘度密度传感器由封装的弯曲板波 (FPW) 谐振器组成，该谐振器配备了用于传感器读出的低成本、紧凑型电子器件。在第一阶段，通过用兼容恶劣环境的单晶SiC和外延压电AlN材料制造谐振FPW流体传感器，成功实现了技术目标，并展示了其独立测量流体粘度和密度的能力。在第二阶段，将针对特定客户应用开发和优化功能齐全、封装和电子仪表的恶劣环境流体粘度-密度传感器原型。流体传感器将在我们客户的系统中进行现场测试，以展示精确和准确的流体粘度和密度测量以及在客户的流体和环境条件下的稳定运行。第二阶段成功完成后，恶劣环境流体粘度-密度传感器将在第三阶段进行扩大生产和商业化。恶劣环境流体粘度-密度传感器的商业应用包括：1) 发动机和工业过程设备中油和其他流体的状态维护，2) 制造、化学加工和水/废物处理行业的过程和质量控制，以及 3) 用于石化勘探和开采的井下传感器