SBIR Phase II: Harsh Environment Fluid Viscosity-Density Sensor

SBIR 第二阶段：恶劣环境流体粘度-密度传感器

• 批准号: 0239151
• 负责人: Richard Mlcak
• 金额: $ 50万
• 依托单位: BOSTON MICROSYSTEMS INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-02-15 至 2007-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0239151&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Harsh; Environment

This Small Business Innovation Research Phase II project is aimed at developing MEMS-based miniaturized fluid viscosity and density sensors that can operate within small confines provide electronic readout, and that are capable of surviving harsh environments (high temperature, high pressure, corrosive, abrasive) typical of many fluid sensor applications. The Harsh Environment Fluid Viscosity-Density Sensor consists of a packaged flexural plate wave (FPW) resonator instrumented with low cost, compact electronics for sensor read-out. In Phase I, the technical objectives were successfully accomplished by fabricating resonant FPW fluid sensors from harsh environment compatible single crystal SiC and epitaxial piezoelectric AlN materials, and demonstrated their ability to independently measure fluid viscosity and density. In Phase II, fully functional, packaged and electronically instrumented Harsh Environment Fluid Viscosity-Density Sensor prototypes will be developed and optimized for specific customer applications. The fluid sensors will be field tested in our customer's systems to demonstrate precise and accurate fluid viscosity and density measurements and stable operation in the customer's fluids and environmental conditions. After successful completion of Phase II, the Harsh Environment Fluid Viscosity-Density Sensor will be ready for scale-up manufacturing and commercialization in Phase III.The Harsh Environment Fluid Viscosity-Density Sensor has commercial applications in 1) Condition-Based Maintenance of oils and other fluids in engines and industrial process equipment, 2) Process and Quality Control in manufacturing, chemical processing and water/waste treatment industries, and 3) down-hole sensors for Petrochemical Exploration and Extraction

这个小型企业创新研究阶段II阶段旨在开发基于MEMS的微型流体粘度和密度传感器，这些粘度和密度传感器可以在小限制内运行，可提供电子读数，并且能够在许多流体传感器应用中幸存下来的刺激性环境（高温，高压，高压，腐蚀性，磨料）。苛刻的环境流体粘度密度传感器由一个包装的挠曲板波（FPW）组成，该谐振器具有低成本，紧凑的电子设备，用于传感器。在第一阶段，技术目标是通过制造出兼容的环境兼容单晶SIC和外延压电ALN材料的谐振FPW流体传感器来成功实现的，并证明了它们独立测量流体粘度和密度的能力。在第二阶段，将开发并针对特定的客户应用开发并优化了功能齐全，包装和电子仪器的刺激性环境粘度密度密度原型。流体传感器将在客户的系统中进行现场测试，以证明在客户的流体和环境条件下进行精确，准确的流体粘度和密度测量以及稳定的操作。 After successful completion of Phase II, the Harsh Environment Fluid Viscosity-Density Sensor will be ready for scale-up manufacturing and commercialization in Phase III.The Harsh Environment Fluid Viscosity-Density Sensor has commercial applications in 1) Condition-Based Maintenance of oils and other fluids in engines and industrial process equipment, 2) Process and Quality Control in manufacturing, chemical processing and water/waste treatment industries, and 3) down-hole sensors for Petrochemical Exploration and Extraction