CAREER: Deposition and Interface Properties of Metal Oxide Films on GaAs

技术：本项目旨在产生关于原子层沉积（ALD）分子水平机制的基本知识。特别是研究了烷基酰胺前驱体和水在砷化镓表面的金属氧化物膜的原子层沉积。由于其有趣的表面化学性质，砷化镓提供了一个合适的系统来测试和进一步了解原子层沉积过程中涉及的分子水平机制和动力学过程。此外，其日益增长的技术重要性使得诸如此类的研究非常及时，因为它旨在弥合文献中基础知识的差距。在研究项目中，采用了一种综合的方法，包括使用红外光谱对表面化学进行现场监测，以及对材料和界面性质进行广泛的非原位分析。非技术：该项目涉及材料科学主题领域的基础研究问题，具有高技术相关性。来自不同背景的研究生在跨学科领域接受训练，并且在材料表征方面引入了急需的跨学科实验课程，以补充现有的表面和界面物理讲座课程。来自弱势背景的本科生，以及马里兰大学巴尔的摩县分校麦克奈尔项目的参与者，在一个旨在鼓励他们对科学事业感兴趣的暑期研究项目中受到指导。

Technical: This project aims to produce fundamental knowledge about the molecular level mechanisms of atomic layer deposition (ALD). In particular, atomic layer deposition of metal oxide films from alkyl amide precursors and water on GaAs surfaces is studied. GaAs due to its intriguing surface chemistry provides a suitable system to test and further our understanding of the molecular level mechanisms and kinetic processes involved in the atomic layer deposition process. Furthermore, its increasing technological importance make such as study very timely as it aims to bridge a gap of fundamental knowledge in the literature. A comprehensive approach that includes both in-situ monitoring of the surface chemistry using infrared spectroscopy as well as extensive ex-situ analysis of the materials and interface properties is used during the research project.Non-technical: The project addresses basic research issues in a topical area of materials science with high technological relevance. Graduate students from diverse backgrounds are trained in an interdisciplinary field, and a much needed interdisciplinary laboratory course in materials characterization is introduced to complement an existing lecture course in the physics of surfaces and interfaces. Undergraduate students from disadvantaged backgrounds, as well as participants of the McNair program at the University of Maryland Baltimore County, are mentored during a summer research program with the goal to encourage their interest in scientific careers.