Nanomanufacturing Using Solder Based Three Dimensional Self-Assembly

目前的纳米图形技术本质上是二维的，构造任意的三维纳米元件是极具挑战性的。本提案旨在开发一种简单而高通量的策略来制造这些精确的图案和单分散纳米级组件。具体而言，将开发的拟议策略涉及二维光刻图案模板的自组装，以形成三维，不受约束的多面体组件。除了证明该工艺在100纳米长度尺度上的适用性外，还将进行旨在了解影响整体良率的缺陷容限和参数的研究。提出的低成本、大规模生产具有任意图案的纳米级组件，将使广泛的小型化和更有效的设备能够用于诸如纳米电子学、生物分子成像、药物输送、传感和驱动等应用。此外，该工艺与目前的微芯片制造兼容；因此，该工艺允许在组件内无缝集成电子模块，如晶体管和传感器。在进行研究的同时，还将共同努力加强巴尔的摩高中的本科教育和推广工作。本科生，高中教师和学生，包括代表性不足的少数民族，将被邀请参加研究经验。此外，还将组织旨在提高中小学、大学和公众对科学、工程和纳米技术的欣赏的活动。

Present day nanoscale patterning techniques are inherently two dimensional and it is extremely challenging to construct arbitrary patterned three dimensional nanoscale components. This proposal seeks to develop a simple and high-throughput strategy for fabricating these precisely patterned and monodisperse nanoscale components. Specifically, the proposed strategy that will be developed involves the self-assembly of two dimensional lithographically patterned templates to form three dimensional, untethered polyhedral components. In addition to demonstrating the applicability of the process at the 100 nanometer length scale, investigations directed at understanding defect tolerance and parameters that influence overall yield will also be carried out. The proposed low-cost, mass production of nanoscale components, with arbitrary patterning will enable a wide range of miniaturized and more effective devices to be constructed for applications such as nanoelectronics, biomolecular imaging, drug delivery, sensing, and actuation. Additionally, the process is compatible with present day fabrication of microchips; hence the process allows the seamless integration of electronic modules, such as transistors and sensors, within the components. Along with the research, a concerted effort will be made to enhance undergraduate education and outreach in Baltimore high schools. Undergraduate students, high school teachers and students, including under represented minorities, will be invited to participate in research experiences. Moreover, activities directed at increasing an appreciation for science, engineering and nanotechnology in schools, colleges and to the public will be organized.