Collaborative Research: High-Throughput Nanomanufacturing of 10 NM Feature Patterns Using Ultra-Sharp Probe Arrays

这项研究的目的是为纳米制造中的主要瓶颈问题提供可行的解决方案，包括：i)在足够高的密度下精确放置纳米材料/器件，以及ii)方便的高通量制造。方法是引入新的概念和技术，包括大规模平行的、电子束发射的纳米探针，用于大面积、同步的纳米图案化。利用硅制造、碳纳米管以及相关材料和工艺，将制造出尺寸小于10纳米、高度相同的极细扫描探针尖端阵列。将研究纳米加工过程中涉及的原理和材料行为，以及从极小的探针尖端进行局域电子场发射时的潜在现象。拟议的研究对10纳米制度纳米制造科学和技术的更广泛影响包括科学理解和新的概念进展。这项研究的成功成果将使人们能够制造各种超高密度的纳米特征结构，用于纳米电子学、纳米光子学、纳米磁学和纳米生物器件。更重要的是，对精确放置的超高密度材料和设备进行高产量加工将使纳米技术在电子和其他应用中得到更广泛的使用。最终目标是在先进显示器、传感器阵列技术、电信系统、信息存储存储系统和医疗等领域实现更广泛的工业应用。研究成果将被用于加强纳米科学和技术的教育。

Abstract The objective of this research is to provide viable solutions to major bottleneck issues in nano manufacturing, including, i) precise placement of nanomaterials/devices in high enough densities, and ii) convenient high-throughput fabrications. The approach is to introduce new concepts and techniques involving massively parallel, electron-beam-emitting nano probes for large area, simultaneous nano patterning. An array of extremely fine, scanning probe tips with sub-10 nm dimension and identical heights will be fabricated using silicon fabrication, carbon nanotubes, and related materials and processes. The principles and materials behavior involved in the nanofabrication processing steps as well as underlying phenomena during localized electron field emission from extremely small probe tips will be investigated. The broader impacts of the proposed research on the 10 nm regime nano manufacturing science and technology include scientific understanding and novel conceptual advances. The successful outcome of this research will allow fabrication of a variety of ultra-high-density nanofeatured structures for nanoelectronics, nanophotonics, nanomagnetics, and nano-bio devices. More importantly, high throughput processing of precisely placed, ultra-high-density materials and devices will enable wider use of nanotechnology for electronics and other applications. The ultimate aim is to enable broader industrial utilization in areas such as advanced displays, sensor array technologies, telecommunications systems, information storage memory systems, and medical therapeutics. The research outcome will be leveraged to enhance education in nano-science and technology.