Integrated Actuation, Alignment, and Latching for Reconfigurable Assembled 3D MEMS

用于可重构组装 3D MEMS 的集成驱动、对准和锁存

• 批准号: 0901394
• 负责人: Carol Livermore
• 金额: $ 33万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-08-01 至 2013-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0901394&HistoricalAwards=false
• 关键词: Integrated; Actuation; Alignment; Latching; Reconfigurable

Integrated Actuation, Alignment, and Latching for ReconfigurableAssembled 3D MEMSPrincipal InvestigatorsCarol Livermore and George Barbastathis"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)."The intellectual merit of this research lies in the creation of a new, widely-applicable method for creating complex 3D MEMS from readily-fabricated, foldable 2D precursors, and in the quantitative analysis and practical demonstrations that will validate the method's significant performance capabilities. In particular, the focal point of the intellectual merit is the creation and demonstration of a new mechanical latching methodology to locate the 2D precursors permanently or reconfigurably in their proper positions with respect to one another, as determined by the system's design requirements. The merit of this research is reinforced by its founding on prior, successful modeling and experimental research on cascaded mechanical alignment mechanisms for MEMS, and by the integration of the novel latching mechanisms into a complete system for actuating, aligning, and latching the structures together. Further intellectual merit lies in the uniqueness and simplicity of the proposed integrated approach which enables a diverse range of possible 3D structures to be created using a much simplified microfabrication and assembly process; and powerful applications research for practical systems and as an enabling tool for further research. The intellectual merit of the proposed research is anchored on the PIs' qualifications in MEMS, assembly, and optics, which make them uniquely suited to conduct this research.Latching research will be organized as (1) design, analysis, and demonstration of latching mechanisms that are fabricated and then function in tandem with the actuation and alignment mechanisms that locate the precursors; (2) design, implementation, and experimental characterization of integrated systems that assemble via coupled actuation, alignment, and latching; (3) theoretical and experimental evaluation of their capabilities and limitations, including as a subordinate goal the quantitative measurement of structural positioning accuracy as a function of structure complexity and anisotropy; and (4) identification and measurement of the errors in the assembly process, and the identification and demonstration of alternate designs such as different hinges or latch structures to reduce those errors.The broader impacts of this research are in the student involvement, the broad dissemination of results, and in the new outreach activities that the research will enable. It will provide an excellent opportunity for both graduate and undergraduate students to participate in multidisciplinary, multi-scale research, preparing them for a wide range of future careers. The research results and design protocols that emerge from this project will be widely disseminated to maximize scientific, technological and entrepreneurial impact. Finally, the results will be brought to younger under-represented groups, particularly women, through presentations and design activities in which students are challenged to envision fundamental physics underpinnings, scale-dependence, utilization, and applications.The proposed project will enable innovative, high-impact research on broadly-applicable solutions to the challenging and long-standing question of how best to assemble complex 3D MEMS with minimal cost, minimal difficulty, and maximum geometric accuracy. Through the proposed technical research and the proposed educational activities, the project will simultaneously enable new knowledge, new systems, and new applications while helping to draw a new generation of students into the fields of engineering and small-scale systems.

集成驱动，对齐，和可重新配置组装的三维MEMS主要研究者卡罗尔利弗莫尔和乔治Barbastathis锁“这个奖项是根据2009年美国复苏和再投资法案（公法111-5）资助。“这项研究的智力价值在于创造了一种新的，广泛适用的方法，用于从易于制造的，可折叠的2D前体创建复杂的3D MEMS，以及定量分析和实际演示，将验证该方法的显著性能能力。特别是，知识价值的焦点是创建和演示一种新的机械闭锁方法，以将2D前体永久地或可重新配置地定位在它们相对于彼此的适当位置，如由系统的设计要求所确定的。这项研究的优点是加强了其成立之前，成功的建模和实验研究级联的机械对准机制的MEMS，并通过集成到一个完整的系统，用于致动，对准，并锁定结构的新颖的闩锁机制在一起。进一步的智力价值在于所提出的集成方法的独特性和简单性，该方法使各种可能的3D结构能够使用简化得多的微加工和组装过程来创建;以及用于实际系统的强大应用研究，并作为进一步研究的有利工具。这项研究的智力价值在于研究人员在微机电系统、装配和光学方面的资质，这使得他们特别适合进行这项研究。闭锁研究将组织为：（1）设计、分析和演示闭锁机构，该机构被制造出来，然后与定位前体的致动和对准机构协同工作;（2）通过耦合致动、对准和闭锁组装的集成系统的设计、实现和实验表征;（3）对其能力和局限性的理论和实验评估，包括作为结构复杂性和各向异性的函数的结构定位精度的定量测量作为次要目标;以及（4）识别和测量装配过程中的错误，识别和演示替代设计，如不同的铰链或闩锁结构，以减少这些错误。这项研究的更广泛的影响是在学生参与，广泛传播的结果，并在新的推广活动，研究将使。它将为研究生和本科生提供一个极好的机会，参与多学科，多规模的研究，为他们未来的职业生涯做好准备。该项目产生的研究成果和设计协议将得到广泛传播，以最大限度地扩大科学、技术和企业影响。最后，将通过演示和设计活动将结果带给年轻的代表性不足的群体，特别是女性，在这些活动中，学生们将面临挑战，设想基础物理学基础，尺度依赖，利用和应用。对如何以最低成本最好地组装复杂的3D MEMS这一具有挑战性和长期存在的问题进行广泛适用的解决方案的高影响力研究，最小的难度和最大的几何精度。通过拟议的技术研究和拟议的教育活动，该项目将同时实现新知识，新系统和新应用，同时帮助吸引新一代学生进入工程和小规模系统领域。