Tribologically-Enhanced Encapsulated Microball Bearings for Reduced Friction and Wear in High-Performance Rotary Microactuators and PowerMEMS Devices

摩擦学增强封装微球轴承减少摩擦和磨损的高性能旋转微执行器和PowerMEMS设备提案编号：0901411马里兰州大学帕克PI：礼萨Ghodssi，共同PI：马修麦卡锡摘要这项工作的目的是开发高性能的旋转球轴承微机电系统（MEMS）使用摩擦学增强薄膜涂层。特别强调的是设计，制造和实验表征的UltraNanoCrystalline金刚石（UNCD），碳化硅（SiC），氮化钛（TiN）和氮化硼（BN）薄膜作为硬涂层，以减少摩擦和磨损的微尺度滚动接触。其结果将在用于旋转微致动器和PowerMEMS器件的低摩擦、低磨损和长生命周期微球轴承中实现。这些支撑机构将能够在超过100，000 rpm，并提供实现高速微电子所需的稳定性和可靠性。涡轮发电机以及方向传感器的精确旋转定位系统。智力优点这里提出的工作构成了对微制造滚珠轴承支撑机制的科学和工程的基础研究，包括硬涂层以减少摩擦和磨损。它将特别导致在各种旋转MEMS器件内使用的可靠支撑机构。使用硬涂层的MEMS制造的球轴承的设计和工程将允许实现这些技术的高性能应用。在这里提出的原位实验研究将全面解决材料，负载和操作的影响，微型旋转轴承。这将通过（1）使用薄膜涂层的轴承设计和制造，（2）使用集成微型涡轮驱动的原位实验表征，以及（3）在微加工旋转致动器和PowerMEMS设备中实施优化轴承来实现。更广泛的影响研究这项技术将产生实现几种高性能旋转微机械所必需的低摩擦/磨损微球支撑机制。目前正在进行研究，以开发用于小规模成本效益发电的小型微型涡轮发电机和用于方向传感器系统的旋转致动器平台。这种设备在长寿命周期的可靠演示将对分布式自主系统，如微型空中交通工具，便携式电源系统和传感器网络产生重大影响。在材料科学和MEMS方面，该公司拥有完善的研究和教育计划。拟议研究的跨学科范围涵盖三个主要领域：材料，电气和机械工程。该项目提供了一个很好的机会，让高年级本科生和研究生参与材料工程及其对MEMS领域更广泛影响的硕士和博士研究。PI开发了一个两学期的多学科研究生课程，其中包括一个活跃的实验室组件（MEMS和微系统的设计，制造和测试）。拟议的研究将加强正在进行的工作，开发滚珠轴承支持的微机械在PI？的小组，MEMS传感器和致动器实验室（MSAL），以及马里兰州纳米中心。PI监督一些本科生和研究生，其中大多数是美国公民。共同PI是前NSF GK-12教学研究员，目前是博士后研究员。这些活动将直接影响跨学科研究课程的性质、优秀学生的招募以及通过会议和期刊出版传播知识

Tribologically-Enhanced Encapsulated Microball Bearings for Reduced Friction and Wear in High-Performance Rotary Microactuators and PowerMEMS DevicesProposal Number: 0901411University of Maryland College ParkPI: Reza Ghodssi, Co-PI: Matthew McCarthyAbstractSummaryThe objective of this work is to develop high-performance rotary ball bearings for Microelectromechanical Systems (MEMS) using tribologically-enhanced thin-film coatings. Particular emphasis will be on the design, fabrication, and experimental characterization of UltraNanoCrystalline Diamond (UNCD), Silicon Carbide (SiC), Titanium Nitride (TiN), and Boron Nitride (BN) films as hard-coatings to reduce friction and wear in microscale rolling contacts. The results of this will be implemented in a low-friction, low-wear, and long-lifecycle microball bearing for rotary microactuators and PowerMEMS devices. These support mechanisms will be capable of continuous operation for speeds in excess of 100,000rpm and provide the stability and reliability necessary for the realization of high-speed micro-turbogenerators as well as accurate rotary positioning systems for directional sensors.Intellectual Merits The work proposed here constitutes fundamental research into the science and engineering of microfabricated ball bearing support mechanism including the effects of hard coatings to reduce friction and wear. It will specifically lead to reliable support mechanisms for use within various rotary MEMS devices. The design and engineering of MEMS-fabricated ball bearings using hard-coatings will allow the realization of these technologies for high-performance applications. The in-situ experimental investigation proposed here will comprehensively address the effects of materials, loading, and operation on microfabricated rotary bearings. This will be achieved through (1) bearing design and fabrication using thin-film coatings, (2) in-situ experimental characterization using integrated microturbine actuation, and (3) implementation of optimized bearings in microfabricated rotary actuators and PowerMEMS devices.Broader Impacts Research This technology will yield a low-friction/wear microball support mechanism necessary for the realization of several high-performance rotary micromachines. Ongoing research is being conducted on the development of compact micro-turbogenerators for small-scale cost-effective power generation and rotary actuator platforms for directional sensor systems. The reliable demonstration of such devices over long life-cycles would have a substantial impact on distributed autonomous systems such as micro-air-vehicles, portable power systems, and sensor networks.EducationThis research will complement the university?s well-established research and education programs in materials science and MEMS. The interdisciplinary scope of the proposed research covers three major areas: Materials, Electrical, and Mechanical Engineering. The project offers an excellent opportunity to engage senior undergraduate and graduate students in masters and doctoral-level research on materials engineering and its broader impact on the MEMS field. The PI has developed a two-semester multidisciplinary graduate-level course with an active laboratory component (Design, Fabrication, and Testing of MEMS and Microsystems). The proposed research will strengthen ongoing work developing ball-bearing supported micromachines in the PI?s group, the MEMS Sensors and Actuators Laboratory (MSAL), as well as the Maryland Nanocenter. The PI supervises a number of undergraduate and graduate students, the majority of whom are US citizens. The co-PI is a former NSF GK-12 Teaching Fellow, and currently a postdoctoral researcher. These activities will directly impact the nature of the interdisciplinary research curriculum, recruitment of outstanding students, and dissemination of knowledge through conferences and refereed journal publication