SGER: Integrated InP Microcantilever Biosensors Using Chitosan Interface Layer

本（SGER）的目的是开发的基础，研究选择性沉积和光学机械特性的InP光学MEMS/NEMS检测平台上的壳聚糖生物聚合物材料。.本SGER计划将执行以下三项任务：（a）壳聚糖电沉积条件将使用组合方法来表征，以实现InP微结构上的膜的最佳形态和厚度。（B）InP光学MEMS/NEMS平台的设计将基于最佳壳聚糖电沉积结果来修改，以使位移灵敏度最大化，（c）将首次使用InP光学MEMS/NEMS装置，展示将探针DNA分子与壳聚糖膜结合的DNA杂交检测。我们提出的设计的主要优点是，它将使单芯片便携式检测生物危害。微悬臂梁传感器已被证明是强大的分析工具，不需要标记的样品。芯片上的光学检测将提供一个小型化但高灵敏度的读出方案，适用于便携式设备。此外，使用壳聚糖作为生物界面将增加悬臂梁的目标生物分子密度，导致大的共振频率偏移。所提出的检测系统与批量微加工兼容。可以在同一芯片上并行制造大量传感器，以非常低的成本和高通量筛选不同的分析物。更广泛的影响由此产生的设备将是小的，便宜的，并将需要最少的样品制备和没有外部读出设备。这项技术将导致开发微悬臂传感器，以在偏远地区筛查疾病和生物危害剂，而不需要高素质的实验室技术人员或设备。该项目也将在马里兰州大学（UMD）具有相当大的教育价值。这项工作将招募美国的本科生和研究生。这项研究的概念将转移到两个研究生水平的项目为基础的MEMS课程，ENEE 605和ENEE 719 F，在电气和计算机工程系（ECE）在UMD。 这项研究的结果也将用于K-12外展活动，包括春季学期的马里兰州日。 1

The objective of this (SGER) is to develop the foundation for investigating the selective deposition and opto-mechanical characterization of chitosan biopolymer material on the InP optical MEMS/NEMS detection platform. . The following three tasks will be conducted for this SGER program: (a) Chitosan electrodeposition conditions will be characterized using a combinatorial approach to achieve optimal morphology and thickness of the film on the InP microstructures, (b) Design of the InP Optical MEMS/NEMS platform will be modified based on the optimum chitosan electrodeposition results to maximize displacement sensitivity, (c) DNA hybridization detection with probe DNA molecules conjugated to the chitosan film will be demonstrated for the first time using InP optical MEMS/NEMS devices. Intellectual Merit The major advantage of our proposed design is that it will enable single-chip portable detection of biohazards. Microcantilever sensors have been shown as powerful analytical tools that do not require labeling of the sample. The on-chip optical detection will provide a miniaturized yet highly sensitive readout scheme appropriate for portable devices. In addition, the use of chitosan as a biointerface will increase the target biomolecule density of the cantilever, resulting in large resonant frequency shifts. The detection system proposed is compatible with batch microfabrication. Large numbers of sensors can be fabricated in parallel on the same chip to screen for different analytes with very low cost and high throughput. Broader Impact The resulting devices will be small, inexpensive, and will require minimal sample preparation and no external readout equipment. This technology will result in developing microcantilever sensors to screen for diseases and biohazard agents at remote locations without the need for highly qualified laboratory technicians or equipment. This project will also have considerable educational value at the University of Maryland (UMD). Primarily U.S. undergraduate and graduate students will be recruited for this work. The concepts of this research will be transferred to the two graduate-level project-based MEMS courses, ENEE 605 and ENEE 719F, in the Electrical and Computer Engineering Department (ECE) at UMD. The outcome of this research will also be used for K-12 outreach activities including Maryland Day in spring semesters. 1