SGER: Integrated Indium Phosphide Based Microsystem for Chemical Sensing

SGER：用于化学传感的集成磷化铟微系统

• 批准号: 0841058
• 负责人: Reza Ghodssi
• 金额: --
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2009-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0841058&HistoricalAwards=false
• 关键词: SGER; Integrated; Indium; Phosphide; Based

SummaryObjective:The objective of this effort is to investigate the feasibility of a highly sensitive microsystem for chemical sensing based on an indium phosphide substrate.Intellectual Merit: This proposal explores the possibility of optical detection of chemicals using an integrated system on an indium phosphide substrate. It will include a laser source, integrated directly with a microcantilever and photodetectors, that will permit the precise tracking of the resonant frequency of the cantilever. Functionalized coatings on the cantilever will be used to absorb chemicals from the environment and this interaction will change the mass, and consequently, the resonant frequency, of the cantilever. The system implementation will include a servo-control circuit. The integration of a micromechanical and photonic system is expected to yield very high sensitivity.Broader Impact: This project has substantial interdisciplinary scope, encompassing photonics, micromechanics, and chemical sensing. In addition to its research outcome, it promises to be a good vehicle for teaching students at both undergraduate and graduate levels. The research results will be disseminated through classroom instruction and workshops.

SummaryObjective：这项工作的目的是研究一个高灵敏度的化学传感的基础上磷化铟substrate.Intellectual Merit的微系统的可行性：这项建议探讨了使用集成系统的磷化铟基板上的化学品的光学检测的可能性。 它将包括一个激光源，直接与微悬臂和光电探测器集成，这将允许精确跟踪悬臂的谐振频率。 悬臂上的功能化涂层将用于吸收环境中的化学物质，这种相互作用将改变悬臂的质量，从而改变悬臂的共振频率。 该系统的实施将包括一个伺服控制电路。 微机械和光子系统的集成预计将产生非常高的灵敏度。更广泛的影响：该项目具有实质性的跨学科范围，包括光子学，微机械和化学传感。 除了它的研究成果，它有望成为一个很好的工具，在本科和研究生水平的教学学生。 研究结果将通过课堂教学和讲习班传播。