SGER: Integrated Indium Phosphide Based Microsystem for Chemical Sensing

目的：这项工作的目的是研究一种基于磷化铟衬底的高灵敏度化学传感微系统的可行性。智能优点：这项提议探索了在磷化铟衬底上使用集成系统进行化学物质光学检测的可能性。它将包括一个直接与微悬臂集成的激光光源和光电探测器，从而能够精确跟踪悬臂的共振频率。悬臂上的功能化涂层将被用于从环境中吸收化学物质，这种相互作用将改变悬臂的质量，从而改变悬臂的共振频率。该系统的实施将包括一个伺服控制电路。微机械和光子系统的集成有望产生非常高的灵敏度。广泛的影响：该项目具有很大的跨学科范围，包括光子学、微机械和化学传感。除了它的研究成果，它有望成为教授本科生和研究生水平的一个很好的工具。研究成果将通过课堂教学和讲习班传播。

SummaryObjective:The objective of this effort is to investigate the feasibility of a highly sensitive microsystem for chemical sensing based on an indium phosphide substrate.Intellectual Merit: This proposal explores the possibility of optical detection of chemicals using an integrated system on an indium phosphide substrate. It will include a laser source, integrated directly with a microcantilever and photodetectors, that will permit the precise tracking of the resonant frequency of the cantilever. Functionalized coatings on the cantilever will be used to absorb chemicals from the environment and this interaction will change the mass, and consequently, the resonant frequency, of the cantilever. The system implementation will include a servo-control circuit. The integration of a micromechanical and photonic system is expected to yield very high sensitivity.Broader Impact: This project has substantial interdisciplinary scope, encompassing photonics, micromechanics, and chemical sensing. In addition to its research outcome, it promises to be a good vehicle for teaching students at both undergraduate and graduate levels. The research results will be disseminated through classroom instruction and workshops.