Broadband dielectric spectrometers with 1-10 nm planar nanofluidic channels

具有 1-10 nm 平面纳米流体通道的宽带介电谱仪

• 批准号: 0925424
• 负责人: Pingshan Wang
• 金额: $ 32.41万
• 依托单位: Clemson University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-08-15 至 2014-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0925424&HistoricalAwards=false
• 关键词: Broadband; dielectric; spectrometers; 10; nm

The objective of this research is to develop broadband dielectric spectrometers with 1-10 nm planar nanofluidic channels for the study of confinement effects of fluids and molecules. The approach is to use wet etch of native silicon dioxide and wafer bonding to form nanofluidic channels and to use doped silicon as transmission lines to provide broadband characterization capabilities. Parasitic signal de-embedding procedures for accurate measurement will be developed. The obtained spectrometer will be used to study confined water properties under DC electric fields. The measured water properties will also serve to demonstrate the functionality of the developed spectrometers. Intellectual merits: This is the first effort to integrate broadband dielectric spectroscopy with individual nanofluidic channels. The obtained critical channel dimension approaches 1 nm, which is vital for studying confined fluids and confined molecules. The measured dielectric properties of confined water under DC electric field stresses have also not been reported to date. These results are important to verify models in molecular dynamics studies.Broader impacts: The dielectric spectrometers are powerful new tools for use in biology, chemistry, nanofluidic electronics, health science and tribology. Transformational research results are expected in these areas with the developed spectrometers. Social, economical and environmental impacts include novel analytical instruments for health services and high performance electrochemical capacitors, which is critical for electric cars to mitigate energy challenges and greenhouse gas emissions. The integration of research and teaching will enrich high-speed circuit courses, inspire and attract students of diverse backgrounds into the science and engineering disciplines.

本研究的目的是开发具有 1-10 nm 平面纳米流体通道的宽带介电谱仪，用于研究流体和分子的限制效应。 该方法是使用天然二氧化硅的湿法蚀刻和晶圆键合来形成纳米流体通道，并使用掺杂硅作为传输线来提供宽带表征能力。 将开发用于精确测量的寄生信号去嵌入程序。 所获得的光谱仪将用于研究直流电场下承压水的特性。 测量的水特性也将用于展示所开发的光谱仪的功能。 智力优点：这是首次将宽带介电光谱与单个纳米流体通道集成。 获得的临界通道尺寸接近1 nm，这对于研究受限流体和受限分子至关重要。 迄今为止，在直流电场应力下测得的承压水介电性能也尚未见报道。 这些结果对于验证分子动力学研究中的模型非常重要。更广泛的影响：介电谱仪是用于生物学、化学、纳米流体电子学、健康科学和摩擦学的强大新工具。 开发的光谱仪有望在这些领域取得变革性的研究成果。 社会、经济和环境影响包括用于健康服务的新型分析仪器和高性能电化学电容器，这对于电动汽车缓解能源挑战和温室气体排放至关重要。 研究与教学的融合将丰富高速电路课程，激发和吸引不同背景的学生进入科学和工程学科。