MRI-R2 Consortium: Acquisition of an Electron Beam Lithography System to Support Transformative Device and Materials Research in the Greater Houston Area

MRI-R2 联盟：收购电子束光刻系统以支持大休斯顿地区的变革性器件和材料研究

• 批准号: 0959343
• 负责人: Dmitri Litvinov
• 金额: $ 80万
• 依托单位: University of Houston
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-03-15 至 2013-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0959343&HistoricalAwards=false
• 关键词: MRI; R2; Consortium; Acquisition; Electron

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).Objective: The objective of this grant application is to acquire an electron beam lithography (EBL) system to support nanofabrication research in the Houston metropolitan area. Houston is home to numerous research-intensive universities, the Texas Medical Center, and active industrial research. The system will be installed at the University of Houston, which houses the only shared fabrication resources in the Greater Houston area. This acquisition will build on the existing tool set and provide state-of-the-art nanofabrication capabilities to a broad user base, thereby elevating nanoscience research in Houston to a globally competitive level.Intellectual Merit: Acquisition of a dedicated EBL system will enhance transformative research across a wide range of federally-funded materials and device programs, including nanomagnetic devices, biosensors, drug/gene delivery, resistive RAM, vertical electronic devices, chemically-amplified imaging materials, nanopantography, magnetic nanoconstrictions, nanowire interconnects, nanoscale light sources, nanomechanics, microfluidics, and nanostructured spintronic devices. The enabling EBL capabilities will stimulate development of new research programs.Broader Impacts: The EBL acquisition will enhance the educational experience of more than 60 students at the University of Houston (UH), University of Texas Health Science Center (UTHSC), and Rice University. Team members will incorporate EBL training into educational programs at their home institutions, including Integrative Graduate Education and Research Traineeship at Rice; Research Experiences for Undergraduates at UH and Rice; Research Experiences for Teachers at UH; Alliances for Graduate Education and the Professoriate at UH and Rice; Awards to Stimulate and Support Undergraduate Research Education at Rice; and Nanotechnology Undergraduate Education at UH.

该奖项是根据2009年《美国复苏和再投资法案》(Public Law 111-5)资助的。目的：这项拨款申请的目标是获得一个电子束光刻(EBL)系统，以支持休斯顿大都市区的纳米制造研究。休斯顿是众多研究密集型大学、德克萨斯医学中心和活跃的工业研究的所在地。该系统将安装在休斯顿大学，该大学拥有大休斯顿地区唯一的共享制造资源。此次收购将建立在现有工具的基础上，并为广泛的用户群提供最先进的纳米制造能力，从而将休斯顿的纳米科学研究提升到具有全球竞争力的水平。智力优势：收购专用的EBL系统将加强一系列联邦资助的材料和设备计划的变革性研究，包括纳米磁性设备、生物传感器、药物/基因输送、电阻RAM、垂直电子设备、化学放大成像材料、纳米技术、磁性纳米收缩、纳米线互连、纳米光源、纳米机械、微流体和纳米结构螺旋电子设备。支持EBL的能力将刺激新研究项目的开发。更广泛的影响：EBL的收购将增强休斯顿大学(UH)、德克萨斯大学健康科学中心(UTHSC)和莱斯大学60多名学生的教育体验。团队成员将把EBL培训纳入他们本国机构的教育项目，包括莱斯大学的综合研究生教育和研究培训；密歇根大学和莱斯大学本科生的研究经验；密歇根大学教师的研究经验；密歇根大学和莱斯大学研究生教育联盟和教授联盟；激励和支持莱斯大学本科生研究教育的奖项；以及密歇根大学纳米技术本科生教育。