MRI Consortium: Acquisition of a Nanoimprint Lithography System to Support Transformative Device and Materials Research in the Greater Houston Area

MRI 联盟：收购纳米压印光刻系统以支持大休斯顿地区的变革性设备和材料研究

• 批准号: 1337719
• 负责人: Dmitri Litvinov
• 金额: $ 56.8万
• 依托单位: University of Houston
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-09-01 至 2017-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1337719&HistoricalAwards=false
• 关键词: MRI; Consortium; Acquisition; Nanoimprint; Lithography

Objective: To acquire a nano-imprint lithography system to support device and materials research in the Houston area.Intellectual Merit: Nano-imprint is a power tool enabling 50-100 nm technologies and eliminating the need for e-beam lithography. Incorporation of nano-imprint in an educational facility will enable students to gain insight into the imprint process. Broad Impact: The proposed research has a broad impact in micro and nano-fabrication technologies. A "nano-engineering minor" exists in the university and they aim to enhance this program, and the acquisition of this new instrument will help their program. The existing team is quite large consisting of over sixty (60) graduate and undergraduate students, whose research projects will benefit from nano-imprint lithography capabilities.

目的：获得纳米压印光刻系统，以支持休斯顿地区的器件和材料研究。知识优势：纳米压印是一种能够实现50-100 nm技术的动力工具，无需使用电子束光刻。在教育设施中纳入纳米压印将使学生能够深入了解压印过程。广泛的影响：拟议的研究在微米和纳米制造技术方面具有广泛的影响。大学里有一个“纳米工程辅修课程”，他们的目标是加强这个课程，购买这种新仪器将有助于他们的课程。现有的团队是相当大的六十（60）研究生和本科生，其研究项目将受益于纳米压印光刻能力组成。