MRI Consortium: Acquisition of a Nanoimprint Lithography System to Support Transformative Device and Materials Research in the Greater Houston Area

目的：获得一套纳米压印光刻系统，以支持休斯顿地区的器件和材料研究。智能优点：纳米压印是一种强大的工具，可以实现50-100 nm的技术，消除了电子束光刻的需要。在教育设施中加入纳米印记将使学生能够深入了解印记过程。广泛影响：拟议的研究对微米和纳米制造技术产生了广泛影响。这所大学有一个“纳米工程辅修专业”，他们的目标是加强这个项目，而获得这个新仪器将对他们的项目有所帮助。现有的团队相当庞大，由60多名研究生和本科生组成，他们的研究项目将受益于纳米压印光刻能力。

Objective: To acquire a nano-imprint lithography system to support device and materials research in the Houston area.Intellectual Merit: Nano-imprint is a power tool enabling 50-100 nm technologies and eliminating the need for e-beam lithography. Incorporation of nano-imprint in an educational facility will enable students to gain insight into the imprint process. Broad Impact: The proposed research has a broad impact in micro and nano-fabrication technologies. A "nano-engineering minor" exists in the university and they aim to enhance this program, and the acquisition of this new instrument will help their program. The existing team is quite large consisting of over sixty (60) graduate and undergraduate students, whose research projects will benefit from nano-imprint lithography capabilities.