Tailor-made Superhydrophobic Surfaces for MEMS and NEMS

为 MEMS 和 NEMS 定制的超疏水表面

• 批准号: 0970071
• 负责人: Kamil Ekinci
• 金额: $ 28.01万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-05-01 至 2014-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0970071&HistoricalAwards=false
• 关键词: Tailor; made; Superhydrophobic; Surfaces; MEMS

The research objective of this award is to elucidate the mechanisms of viscous energy dissipation on superhydrophobic surfaces and to enable robust operation of micro and nanoelectromechanical systems (MEMS and NEMS) in water through surface engineering. MEMS and NEMS are miniaturized mechanical devices, which are fabricated using semiconductor processes and are suitable for numerous technological applications, including ultrasensitive bio-sensing. The research approach is to shrink the solid-water interface area of MEMS and NEMS by engineering these devices with superhydrophobic surfaces. The research will combine theoretical and numerical work with experiments. Superhydrophobic MEMS and NEMS will be fabricated based on the numerical and theoretical surface designs; the devices will be tested in water to assess the designs. The main device parameter to be optimized is the quality (Q) factor, which quantifies the viscous dissipation in water. The deliverables are scalable superhydrophobic materials and coatings for nanoscale device applications, high-performance MEMS and NEMS devices in water and a fundamental physical understanding of solid-liquid-gas interfaces under high-frequency oscillations.The research will provide an enabling technology for MEMS and NEMS devices in water. Operation of MEMS and NEMS in water-based biochemical solutions is crucial for future mass and force sensing applications. MEMS and NEMS sensor elements can provide powerful new approaches to bio-threat detection, drug screening, and medical diagnostics in liquids. In scanning probe microscopy (SPM), force sensitivity of the microcantilever probe can be improved in liquids by the results of this research. Graduate and undergraduate students will be trained in a wide cross-section of engineering and physics including nanoscale surface engineering, nanometrology, and fluid dynamics through classroom instruction and participation in research. Outreach activities co-sponsored by Boston University will be used as a platform to engage K-12 students and disseminate the results of the research broadly.

该奖项的研究目标是阐明超疏水表面上粘性能量耗散的机制，并通过表面工程实现微纳机电系统（MEMS和NEMS）在水中的稳健运行。MEMS和NEMS是小型化的机械装置，其使用半导体工艺制造并且适用于许多技术应用，包括超灵敏的生物传感。研究方法是通过将MEMS和NEMS设计成具有超疏水表面的器件来缩小这些器件的固-水界面面积。 本研究将联合收割机的理论和数值计算工作与实验相结合。 超疏水MEMS和NEMS将根据数值和理论表面设计制造;这些器件将在水中进行测试以评估设计。待优化的主要装置参数是质量（Q）因子，其量化水中的粘性耗散。该研究成果包括用于纳米级器件应用的可扩展超疏水材料和涂层、水中高性能MEMS和NEMS器件，以及对高频振荡下固-液-气界面的基本物理理解。该研究将为水中MEMS和NEMS器件提供一种使能技术。MEMS和NEMS在水基生化解决方案中的操作对于未来的质量和力传感应用至关重要。MEMS和NEMS传感器元件可以为液体中的生物威胁检测、药物筛选和医疗诊断提供强大的新方法。在扫描探针显微镜（SPM）中，本研究的结果可以提高微悬臂梁探针在液体中的力灵敏度。研究生和本科生将通过课堂教学和参与研究，在工程和物理学的广泛领域进行培训，包括纳米表面工程，纳米计量学和流体动力学。由波士顿大学共同赞助的外联活动将被用作一个平台，以吸引K-12学生并广泛传播研究成果。