Tailor-made Superhydrophobic Surfaces for MEMS and NEMS

该奖项的研究目标是阐明超疏水表面上粘性能量耗散的机制，并通过表面工程实现水中微纳机电系统（MEMS和NEMS）的鲁棒运行。MEMS和NEMS是采用半导体工艺制造的小型化机械器件，适用于包括超灵敏生物传感在内的许多技术应用。研究方法是通过设计超疏水表面来缩小MEMS和NEMS的固水界面面积。这项研究将把理论和数值工作与实验结合起来。超疏水MEMS和NEMS将基于数值和理论表面设计制造；这些装置将在水中进行测试，以评估设计。要优化的主要装置参数是质量(Q)因子，它量化了在水中的粘性耗散。可交付成果包括纳米级器件应用的可扩展超疏水材料和涂层，水中高性能MEMS和NEMS器件，以及对高频振荡下固液气界面的基本物理理解。该研究将为水中的MEMS和NEMS器件提供使能技术。MEMS和NEMS在水基生化解决方案中的运行对于未来的质量和力传感应用至关重要。MEMS和NEMS传感器元件可以为液体中的生物威胁检测、药物筛选和医疗诊断提供强大的新方法。在扫描探针显微镜（SPM）中，该研究结果可以提高微悬臂探针在液体中的力灵敏度。研究生和本科生将通过课堂教学和参与研究，在广泛的工程和物理领域接受培训，包括纳米表面工程、纳米计量学和流体动力学。由波士顿大学共同赞助的外展活动将被用作吸引K-12学生的平台，并广泛传播研究结果。

The research objective of this award is to elucidate the mechanisms of viscous energy dissipation on superhydrophobic surfaces and to enable robust operation of micro and nanoelectromechanical systems (MEMS and NEMS) in water through surface engineering. MEMS and NEMS are miniaturized mechanical devices, which are fabricated using semiconductor processes and are suitable for numerous technological applications, including ultrasensitive bio-sensing. The research approach is to shrink the solid-water interface area of MEMS and NEMS by engineering these devices with superhydrophobic surfaces. The research will combine theoretical and numerical work with experiments. Superhydrophobic MEMS and NEMS will be fabricated based on the numerical and theoretical surface designs; the devices will be tested in water to assess the designs. The main device parameter to be optimized is the quality (Q) factor, which quantifies the viscous dissipation in water. The deliverables are scalable superhydrophobic materials and coatings for nanoscale device applications, high-performance MEMS and NEMS devices in water and a fundamental physical understanding of solid-liquid-gas interfaces under high-frequency oscillations.The research will provide an enabling technology for MEMS and NEMS devices in water. Operation of MEMS and NEMS in water-based biochemical solutions is crucial for future mass and force sensing applications. MEMS and NEMS sensor elements can provide powerful new approaches to bio-threat detection, drug screening, and medical diagnostics in liquids. In scanning probe microscopy (SPM), force sensitivity of the microcantilever probe can be improved in liquids by the results of this research. Graduate and undergraduate students will be trained in a wide cross-section of engineering and physics including nanoscale surface engineering, nanometrology, and fluid dynamics through classroom instruction and participation in research. Outreach activities co-sponsored by Boston University will be used as a platform to engage K-12 students and disseminate the results of the research broadly.