Tailor-made Superhydrophobic Surfaces for MEMS and NEMS

为 MEMS 和 NEMS 定制的超疏水表面

• 批准号: 0970071
• 负责人: Kamil Ekinci
• 金额: $ 28.01万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-05-01 至 2014-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0970071&HistoricalAwards=false
• 关键词: Tailor; made; Superhydrophobic; Surfaces; MEMS

The research objective of this award is to elucidate the mechanisms of viscous energy dissipation on superhydrophobic surfaces and to enable robust operation of micro and nanoelectromechanical systems (MEMS and NEMS) in water through surface engineering. MEMS and NEMS are miniaturized mechanical devices, which are fabricated using semiconductor processes and are suitable for numerous technological applications, including ultrasensitive bio-sensing. The research approach is to shrink the solid-water interface area of MEMS and NEMS by engineering these devices with superhydrophobic surfaces. The research will combine theoretical and numerical work with experiments. Superhydrophobic MEMS and NEMS will be fabricated based on the numerical and theoretical surface designs; the devices will be tested in water to assess the designs. The main device parameter to be optimized is the quality (Q) factor, which quantifies the viscous dissipation in water. The deliverables are scalable superhydrophobic materials and coatings for nanoscale device applications, high-performance MEMS and NEMS devices in water and a fundamental physical understanding of solid-liquid-gas interfaces under high-frequency oscillations.The research will provide an enabling technology for MEMS and NEMS devices in water. Operation of MEMS and NEMS in water-based biochemical solutions is crucial for future mass and force sensing applications. MEMS and NEMS sensor elements can provide powerful new approaches to bio-threat detection, drug screening, and medical diagnostics in liquids. In scanning probe microscopy (SPM), force sensitivity of the microcantilever probe can be improved in liquids by the results of this research. Graduate and undergraduate students will be trained in a wide cross-section of engineering and physics including nanoscale surface engineering, nanometrology, and fluid dynamics through classroom instruction and participation in research. Outreach activities co-sponsored by Boston University will be used as a platform to engage K-12 students and disseminate the results of the research broadly.

该奖项的研究目的是阐明超疏水表面上粘性能量耗散的机制，并通过表面工程在水中实现微型和纳米机电系统（MEM和NEMS）的强大运行。 MEMS和NEM是小型机械设备，它们是使用半导体工艺制造的，适用于许多技术应用，包括超敏感的生物感应。研究方法是通过用超疏水表面工程来缩小MEM和NEM的固体水接口区域。 该研究将将理论和数值工作与实验结合在一起。 超疏水MEM和NEM将根据数值和理论表面设计制造；设备将在水中进行测试以评估设计。要优化的主要设备参数是质量（Q）因子，它量化了水中的粘性耗散。可交付成果是可扩展的超疏水材料和用于纳米级设备应用，高性能MEMS和水中的NEMS设备的涂料，以及对高频振荡下对固液 - 气体接口的基本物理理解。该研究将为水中的MEMS和NEMS设备提供支持的技术。 MEM和NEM在水基生化溶液中的操作对于将来的质量和力传感应用至关重要。 MEMS和NEMS传感器元素可以为液体中的生物威胁检测，药物筛查和医学诊断提供强大的新方法。在扫描探针显微镜（SPM）中，通过这项研究的结果可以改善液体中微型抗体探针的力敏感性。研究生和本科生将通过课堂教学和参与研究进行培训，包括纳米级表面工程，纳米学和流体动力学在内的广泛的工程和物理学的培训。由波士顿大学共同赞助的外展活动将被用作吸引K-12学生并广泛传播研究结果的平台。