Surface analysis and surface nanoengineering of Nanoelectromechanical Systems at the atomic scale

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NSF 0324416: Surface analysis and surface nanoengineering of Nanoelectromechanical Systems at the atomic scaleThe objective of the proposed research is to investigate and engineer the surface properties of Nano-electro-mechanical Systems (NEMS) at the atomic scale. In nanoscale devices, in particular in NEMS, a significant fraction of the atoms are surface or near-surface atoms. These unusually large surface-to-volume ratios in NEMS can give rise to novel behavior-significantly different from those of bulk solids. The approach herein will rely on scanning probe microscopy (SPM) techniques to gain a physical understanding of surface phenomena in NEMS. NEMS device properties-such as mechanical quality (Q) factor-will then be correlated to the surface properties. In complementary experiments, NEMS surfaces will be modified using well established techniques-such as annealing and sputtering-to create optimized devices.Educationally, the results of the proposed research will be disseminated in a graduate course at Boston University that covers aspects of SPM, nanomechanics and nanoelectronics. Moreover, the project represents a significant opportunity in the training of students in nanotechnology: the graduate students working on aspects of these experiments will not only master cutting edge technologies-such as SPM, nano-fabrication and ultra-fast electronics-but also develop a sound understanding of some of the fundamental concepts in surface science and physics.