Surface analysis and surface nanoengineering of Nanoelectromechanical Systems at the atomic scale

原子尺度纳米机电系统的表面分析和表面纳米工程

• 批准号: 0324416
• 负责人: Kamil Ekinci
• 金额: $ 20.97万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0324416&HistoricalAwards=false
• 关键词: Surface; analysis; surface; nanoengineering; Nanoelectromechanical

NSF 0324416: Surface analysis and surface nanoengineering of Nanoelectromechanical Systems at the atomic scaleThe objective of the proposed research is to investigate and engineer the surface properties of Nano-electro-mechanical Systems (NEMS) at the atomic scale. In nanoscale devices, in particular in NEMS, a significant fraction of the atoms are surface or near-surface atoms. These unusually large surface-to-volume ratios in NEMS can give rise to novel behavior-significantly different from those of bulk solids. The approach herein will rely on scanning probe microscopy (SPM) techniques to gain a physical understanding of surface phenomena in NEMS. NEMS device properties-such as mechanical quality (Q) factor-will then be correlated to the surface properties. In complementary experiments, NEMS surfaces will be modified using well established techniques-such as annealing and sputtering-to create optimized devices.Educationally, the results of the proposed research will be disseminated in a graduate course at Boston University that covers aspects of SPM, nanomechanics and nanoelectronics. Moreover, the project represents a significant opportunity in the training of students in nanotechnology: the graduate students working on aspects of these experiments will not only master cutting edge technologies-such as SPM, nano-fabrication and ultra-fast electronics-but also develop a sound understanding of some of the fundamental concepts in surface science and physics.

NSF 0324416：纳米机电系统在原子尺度上的表面分析和表面纳米工程研究的目的是在原子尺度上研究和设计纳米机电系统（NEMS）的表面特性。 在纳米器件中，特别是在NEMS中，原子的很大一部分是表面或近表面原子。 NEMS中这些异常大的表面积与体积比可以引起新的行为-与散装固体的行为显著不同。 本文的方法将依赖于扫描探针显微镜（SPM）技术，以获得物理的理解NEMS中的表面现象。 NEMS设备属性-例如机械质量（Q）因子-将与表面属性相关联。 在补充实验中，NEMS表面将使用完善的技术进行修改，如退火和退火，以创建优化的设备。在教育方面，拟议的研究结果将在波士顿大学的研究生课程中传播，涵盖SPM，纳米力学和纳米电子学的各个方面。 此外，该项目代表了一个重要的机会，在纳米技术的学生培训：研究生在这些实验方面的工作将不仅掌握尖端技术，如SPM，纳米制造和超快电子学，但也制定了一些表面科学和物理学的基本概念的良好理解。