SBIR Phase IB: Development of Miniature Endoscopic Imaging Probes for In Vivo Noninvasive Optical Imaging for Early Diagnosis of Lung Cancer

这个小型企业创新研究(SBIR)第一阶段项目将设计和制造直径为2.8 mm的基于光学相干层析成像(OCT)的MEMS探头。该计划将应用MEMS设计和无引线键合封装技术来实现探头的小型化。在这种MEMS设计中，反射镜将在反射镜表面的相对芯片侧具有高填充系数和键合焊盘。MEMS反射镜和其他光学元件将被封装到基于MEMS的探头中；该探头将与现有的OCT系统相连，然后将进行肺部成像测试。建议的基于MEMS的OCT系统有可能成为一种低成本的工具，用于在护理点快速诊断或筛查肺癌。预计该技术还可以用于其他OCT系统的内脏成像。如果成功，提出的MEMS设计和无引线键合(WBF)封装技术几乎可以应用于所有光学成像系统，包括相干、共焦、非线性和自适应光学成像。它们还可以用于激光扫描显示器和光学电信。这一努力可能会导致世界上第一个基于MEMS的OCT，适用于在护理地点(如床边或办公室)快速诊断或筛查肺癌。由于其低成本和一次性性质，特别适合现场使用，而不需要灭菌设备。虽然这项提议的重点是基于MEMS的内窥镜OCT系统用于支气管镜检查，但开发的关键技术可以适用于其他紧凑型OCT系统用于内脏成像。基于MEMS的内窥镜OCT探头适用于前列腺癌、结肠癌、直肠癌和胃肠癌等各种内部癌症的诊断和图像引导手术。

This Small Business Innovative Research (SBIR) Phase I project an Optical coherence tomography (OCT) imaging MEMS-based probe of 2.8 mm diameter will be designed and manufactured. The plan is to apply MEMS design and wire bonding free packaging techniques for miniaturization of the probe. In this MEMS design the mirror will have high fill factor and bonding pads on the opposite chip side of the reflective mirror surface. The MEMS mirror and the other optical component will be packaged into the MEMS-based probe; the probe will be attached with the existing OCT system, and then will be tested for lung imaging. The proposed MEMS-based OCT system has the potential to be a low-cost tool for rapid diagnosis or screening of lung cancer at the point of care. It is also expected that the technology could be used for other OCT systems for internal organ imaging. If successful the proposed MEMS design and wire bonding-free (WBF) packaging technique can be applied virtually to all optical imaging systems including coherence, confocal, nonlinear and adaptive optical imaging. They can also be used in laser scanning displays and optical telecommunications. This effort may lead to the world?s first MEMS-based OCT applicable to rapid diagnosis or screening of lung cancer at the point of care (e.g., bedside or office). Due to its low-cost and disposable nature, it is particularly suitable for field use without the need of sterilization equipments. Although the focus of this proposal is on a MEMS based endoscopic OCT system for bronchoscopy, the key technology developed can be adapted for other compact OCT systems for internal organ imaging. The MEMS-based endoscopic OCT probe is applicable to diagnosis and image-guided surgery of various internal cancers such as prostate, colon, rectal, and gastro-intestinal cancers.